Defect detection in semiconductor devices

A system for testing an integrated circuit having circuitry in a circuit side opposite a back side, the system comprising:

• means for removing substrate from the back side;
• an energy source adapted to generate response signals that is emitted from the integrated circuit;
• means for detecting the response signals emitted from the integrated circuit;
• means for correlating the detected response signals with a reference signal to determine the amount of deviation from the reference signal that has occurred;
• and
• means for identifying the type of defect in the circuit as a function of the deviation and the energy source used to generate the response signals.

A system for testing an integrated circuit having circuitry in a circuit side opposite a back side, the system comprising:

• a substrate removal device;
• an energy source configured and arranged to excite circuitry in the integrated circuit;
• a plurality of energy source detectors;
• and
• a computer arrangement configured to correlate detected response signals with a reference signal to determine the amount of deviation between signals, and to identify the type of defect in the circuit as a function of the signal deviations and as function of the energy source used to generate the response signal.