Semiconductor device
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorYoshihiko Nemoto
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AssigneeMitsubishi Denki Kabushiki Kaisha
InventorYoshihiko Nemoto
Estimating the term…
The bump underlying metal film has a first metallic deposit film formed by a first electroless plating method, and a second metallic deposit film formed on the first metallic deposit film by a second electroless plating method using a plating solution different in type from that used in the first electroless plating method. The bump underling metal film is so arranged that the first metallic deposit film has a thickness larger than the organic insulating film, and the first metallic deposit film has a peripheral portion superposed on the organic insulating film.
A semiconductor device comprising:
Dependencies are inferred from the claim text.
From the US filing history. Foreign family members aren’t listed.
Interconnections or connectors in packages: bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
Of conductive or resistive materials: using a liquid
Manufacture or treatment: of bump connectors, dummy bumps or thermal bumps
Manufacture or treatment: of bond pads
Term ended 26 Nov 2022 (estimated)
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1. Field of the Invention
The present invention relates to a semiconductor device, and more particularly, to a semiconductor device having an electrode formed on a semiconductor substrate provided with a semiconductor integrated circuit and electrically connected to the semiconductor integrated circuit, an organic insulating film formed on the semiconductor substrate and having an opening through which the electrode is exposed, and a bump electrode formed on the electrode via a bump underlying metal film.
2. Background Art
Other and further objects, features and advantages of the invention will appear more fully from the following description.
FIG. 1(a) is a sectional view of a semiconductor device according to a first embodiment.
FIG. 1(b) is a sectional view of a semi conductor device according to a first embodiment.
The embodiments of the invention will be described in detail with reference to the accompanying drawings.
First Embodiment
Referring now to FIG. 1, the electroless plating step according to this embodiment will be described. After forming a plurality of electrodes 2 on a semiconductor substrate 1, on which semiconductor integrated circuits such as various types of transistors, wirings and the like are formed, an insulating film 4 having an opening 3 through which the electrode 2 is exposed, thereby providing a structure of FIG. 1(a). For the insulating film, an organic insulating film made of an organic material, such as a polyimide, is used.