Substrate rotating device, and manufacturing method and apparatus of recording medium master
AssigneePioneer Corporation
InventorsOsamu Kumasaka, Kazumi Kuriyama, Hiroki Kaneda, Masami Sone, Kenji Kamimura, Takeharu Iwata, Masaki Kobayashi
Life of this patent
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Abstract
A master disc manufacturing apparatus includes an electron-beam emitting portion for emitting an electron beam, an electron-beam converging portion for converging an electron beam, a retarding voltage applying portion for applying a substrate with a negative potential having a magnitude of decelerating the electron beam, and a vacuum atmosphere producing portion for evacuating a chamber to produce a vacuum atmosphere therein.
Claims36
An apparatus for manufacturing a master of a recording medium by irradiation of an electron beam on a substrate placed on a turntable disposed within a chamber, comprising:
- an electron-beam emitting portion for emitting said electron beam;
- an electron-beam converging portion for converging said electron beam to form a beam spot on said substrate;
- a moving portion for moving said substrate relative to said beam spot;
- a retarding voltage applying portion for applying said substrate with a retarding voltage having a magnitude for decelerating electron rays of said electron beam based upon a moving speed of said beam spot on said substrate;
- and
- a vacuum atmosphere producing portion for evacuating said chamber to produce a vacuum atmosphere therein.
An apparatus for manufacturing a master of a recording medium by irradiation of an electron beam on a substrate, comprising:
- an electron-beam emitting portion for emitting said electron beam;
- an insulating turntable for supporting said substrate on a supporting surface thereof, said turntable having a throughhole;
- a spindle housing;
- a spindle shaft rotatably supported by said spindle housing through an air bearing, and having one end fixed to said turntable;
- a motor for rotating said spindle shaft;
- and
- an electron beam decelerating portion for applying said substrate with a retarding voltage of a magnitude of decelerating said electron beam,
- wherein said electron beam decelerating portion includes a conductive member which is urged such that said conductive member can project and retract from and into said supporting surface through the through hole of said turntable, and a relay portion for relaying said retarding voltage to said conductive member through a rotary connector.
A substrate rotating device comprising:
- an insulating turntable for carrying a substrate thereon;
- a spindle housing;
- a spindle shaft rotatably supported by said spindle housing through an air bearing and having one end fixed to said turntable;
- a motor for rotating said spindle shaft;
- and
- an electrostatic chucking portion for attracting said substrate to said turntable,
- wherein said electrostatic chucking portion includes a chucking electrode disposed in said turntable, a power supply cable for supplying a chucking voltage to said chucking electrode through said spindle shaft, and a rotary connector for supplying said chucking voltage to said power supply cable.
An apparatus for manufacturing a master of a recording medium by irradiation of an electron beam on a substrate, comprising:
- an electron-beam emitting portion for emitting said electron beam;
- a substrate rotating device including an insulating turntable for supporting said substrate on a supporting surface thereof;
- said turntable having a throughhole, a spindle housing, a spindle shaft rotatably supported by said spindle housing through an air bearing and having one end fixed to said turntable, and a motor for rotating said spindle shaft;
- a translation driving portion for translating said rotation driving portion relative to said electron-beam emitting portion;
- and
- an electrostatic chucking portion for attracting said substrate to said turntable,
- wherein said electrostatic chucking portion includes a chucking electrode disposed in said turntable, a power supply cable installed in said spindle shaft for supplying a chucking voltage to said chucking electrode, and a rotary connector for supplying said chucking voltage to said power supply cable.
An apparatus for manufacturing a master of a recording medium by irradiation of an electron beam on a substrate placed on a turntable disposed in a chamber, comprising:
- an electron beam emitting portion for emitting said electron beam;
- an electron beam converging portion for converging said electron beam;
- an electron beam decelerating portion for applying said substrate with a retarding voltage of a magnitude of decelerating said electron beam;
- and
- a vacuum atmosphere producing portion for evacuating said chamber to produce a vacuum atmosphere therein,
- wherein said turntable has an adjacent region adjacent to an outer edge of said substrate placed on said turntable and said adjacent region has a predetermined resistance value lower than said vacuum atmosphere.
An apparatus for manufacturing a master of recording medium by irradiation of an electron beam on a substrate placed on a turntable disposed in a chamber, comprising:
- an electron-beam emitting portion for emitting said electron beam;
- an electron-beam converging portion for converging said electron beam;
- a retarding voltage applying portion for applying said substrate with a retarding voltage of a magnitude of decelerating said electron beam;
- a vacuum atmosphere producing portion for evacuating said chamber to produce a vacuum atmosphere therein;
- and
- an adjacent ring having a predetermined resistance value lower than said vacuum atmosphere and adjoining to said substrate placed on said turntable.
A method of manufacturing a master of a recording medium by irradiation of an electron beam on a substrate placed on a turntable disposed in a chamber, comprising:
- evacuating said chamber to a vacuum;
- converging said electron beam so as to form a beam spot on said substrate;
- moving said substrate relative to said beam spot;
- and
- applying a substrate placed on said turntable with a retarding voltage of a magnitude for decelerating said electron beam based upon a moving speed of said beam spot on said substrate.
An apparatus for manufacturing a master by irradiation of an electron beam on a substrate having a resist formed on a principal surface thereof, comprising:
- an electron gun;
- an accelerating voltage applying portion for applying said electron gun with an accelerating voltage to emit an electron beam;
- a rotation driving portion for rotating said substrate substantially at a constant angular velocity;
- a movement driving portion for relatively moving an irradiation position of said electron beam in a rotational radial direction of said substrate;
- an electron beam decelerating portion for applying said substrate with a retarding voltage having a magnitude of decelerating electron rays of said electron beam;
- and
- a controller for varying said electron beam retarding voltage in accordance with the irradiation position of said electron beam in the rotational radial direction of said substrate while maintaining said accelerating voltage substantially constant.
A substrate rotating device comprising a housing, a spindle shaft accommodated in said housing with one end thereof exposed from said housing, said spindle shaft being rotatably supported by a bearing, a motor for driving said spindle shaft, and a magnetic fluid seal intervening between said housing and said spindle shaft, said substrate rotating device for use in a vacuum atmosphere, comprising:
- temperature sensors and electric heaters disposed near said magnetic fluid seal and said motor;
- and
- a temperature controller for controlling said electric heaters based on outputs of said temperature sensors.
A master manufacturing apparatus using a substrate comprising:
- a substrate rotating device for rotating said substrate;
- an electron beam emitting portion including a deflecting portion for controlling deflection of an electron beam and a focus control portion for converging said electron beam to irradiate a principal surface of said substrate with the converged electron beam;
- and
- a movement driving portion for relatively moving said substrate rotating device and said electron beam emitting portion in a radial direction of said substrate,
- wherein said substrate rotating device has a housing;
- a spindle shaft accommodated in said housing with at least one end thereof exposed from said housing and rotatably supported by a static pressure air bearing;
- a motor for rotating said spindle shaft;
- a magnetic fluid seal intervening in a gap between said housing and said spindle shaft;
- temperature sensors and electric heaters disposed near said magnetic fluid seal and said motor;
- and a temperature controller for controlling said electric heaters based on the outputs of said temperature sensors.
Dependencies are inferred from the claim text.