Metal organic precursors for transparent metal oxide thin films and method of making same

#1. Field of the Invention

#This invention relates to metal oxides useful in making transparent electrodes and conductive layers, protective layers for such conductive layers and dielectric layers in flat panel displays, fluorescent lamps and other electrooptical devices, and more particularly to liquid precursors for making such transparent metal oxides and methods for making such precursors.

#2. Statement of the Problem

#FIG. 1 shows a cross-sectional diagrammatic view of a finished fluorescent lamp fabricated in accordance with a preferred embodiment of the invention;

#FIG. 2 shows a cross-sectional diagrammatic view of the lamp wall of the fluorescent lamp of FIG. 1;

#FIG. 3 is a section view of an intermediate stage in the fabrication of active-matrix electron emission luminescent display device having a transparent accelerator electrode layer;

#1. Introduction

#It should be understood that FIGS. 1-4, depicting fluorescent lamp and flat panel display structures, are not meant to be actual plan or cross-sectional views of any particular portion of actual electrooptical devices. In the actual devices, the layers may not be as regular and the thicknesses may have different proportions. The figures instead show idealized representations which are employed only to depict more clearly and fully the use of nonaqueous metal organic liquid precursors of the invention than would otherwise be possible.

#FIG. 1 shows a cross-sectional diagrammatic view of a finished fluorescent lamp 10 fabricated using a preferred embodiment of the inventive liquid precursor. Fluorescent lamp 10 comprises an elongated, light-transmitting envelope 12. In the embodiment depicted in FIG. 1, envelope 12 is a cylindrical glass tube. Envelope 12 typically comprises conventional soda glass, having a soda lime (Na2O) content of 15% to 25%.