Diffusion barrier layer with a high barrier effect
AssigneeEmpa EidgenöSsische MaterialprüFungs- Und Forschungsanstalt
InventorEva Maria Moser
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Abstract
The invention relates to an organic diffusion barrier layer (58) applied to a substrate (44). Said barrier layer has an apolar skeletal structure and a high barrier effect with respect to volatile gases, vapors and liquids. The diffusion barrier layer (58) consists of a hydrocarbon polymer that is produced by means of plasma polymerization. It respectively contains 0.01-6 at % of at least one element from the group consisting of oxygen, nitrogen, fluorine, bromine, boron and silicon, whereby the total amount of said elements does not exceed 12 at %. The barrier effect of the diffusion barrier layer (58) is produced by means of at least one pulsed or continuous DC magnetron sputtering source plasma (26) or by means of inductively excited, pulsed or continuous microwave discharge (20).
Claims11
Substrate (44) with a deposited organic diffusion barrier layer (58) which has a non-polar basic structure with a high barrier effect against highly volatile gases, vapors and fluids, where the diffusion barrier layer (58) consists of a hydrocarbon polymer produced by means of plasma polymerization which contains 0.01-6 at % of at least one element of the group consisting of oxygen, nitrogen, fluorine, chlorine, bromine, boron and silicon, in total however maximum 12 at %,
- the improvement comprising:
- the diffusion barrier layer based on carbon and hydrogen has a content of 20-80 at % of both elements, whereby the barrier effect of the diffusion barrier layer (58) is sustained in air having a relative humidity of 50% and higher.
Dependencies are inferred from the claim text.