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US 6,686,299 B2Granted
Nanosyringe array and method
OwnerCarlo D. Montemagno, Hercules Nevesinventors
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Abstract
A nanosyringe is constructed using micro fabrication and nano fabrication techniques on a silicon substrate. The nanosyringe includes a membrane of silicon carbide. The position and operation of individual nanosyringes, arranged in an array of nanosyringes, can be independently controlled. A nanosyringe array can inject or extract a fluid from one or more cells or other structures. Microfluidic structures coupled to the nanosyringe allow external pumping or extraction. A cell matrix or organelles of individual cells can be non-destructively sampled in real time.
Claims10
A method comprising:
- forming a column on a silicon substrate;
- depositing a membrane on the column;
- removing a portion of the column after depositing the membrane;
- and
- fracturing a portion of the membrane to form a nozzle end.
2 more elements
Dependencies are inferred from the claim text.