Method of fabricating piezoelectric vibrator
AssigneeSeiko Instruments Inc.
InventorsKiyoshi Aratake, Masayoshi Shiraishi
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AssigneeSeiko Instruments Inc.
InventorsKiyoshi Aratake, Masayoshi Shiraishi
Estimating the term…
A method of fabricating a piezoelectric vibrator comprises providing a piezoelectric oscillating plate having a piezoelectric vibrator piece and frame integrally connected to a base end portion of the piezoelectric vibrator piece and surrounding the piezoelectric vibrator piece. A pair of excitation electrodes is disposed on surfaces of two sides of the piezoelectric vibrator piece for vibrating the piezoelectric vibrator piece. Bond films are formed on upper and lower surfaces of the frame and are connected to the excitation electrodes. Shortcircuiting electrodes are disposed on the piezoelectric oscillating plate for causing a shortcircuit to electrically connect the bond films to each other. The piezoelectric vibrator piece is covered to seal the piezoelectric vibrator piece in an airtight manner via the bond films without hampering vibration of the piezoelectric vibrator piece.
A method of fabricating piezoelectric vibrators, comprising the steps of:
A method of fabricating a piezoelectric vibrator comprising:
A method of fabricating a piezoelectric vibrator, comprising the steps of:
Dependencies are inferred from the claim text.