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US 6,686,122 B1Granted
Production of photoresist coatings
AssigneeVantico Inc.
InventorFrans Setiabudi
Life of this patent
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Abstract
Process for the production of a resist coating, in which (a) a substrate is coated with a resist composition which comprises at least one component which absorbs radiation in the near infrared region with warming of the coating; and (b) the resist composition or a composition derived therefrom and obtained during the process is subjected at least once during the process to thermal treatment with the aid of radiation in the near infrared region.
Claims20
A process for the production of a resist coating, in which
- (a) a substrate is coated with a resist composition which comprises at least one component that absorbs radiation in the near infrared region with warming of the coating;
- (b) said resist composition or a composition derived therefrom and obtained during the process is subjected at least once during the process to thermal treatment with the aid of radiation in the near infrared region;
- and
- (c) the resist composition comprises at least one photosensitive component system.
1 more element
Dependencies are inferred from the claim text.