Coating workpiece method using beam of plasma
AssigneeUnaxis Balzers Aktiengesellschaft
InventorsJohann Karner, Mauro Pedrazzini, Christoph Hollenstein, David Franz
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Abstract
Method for coating workpieces generates a beam of a plasma in an evacuated container. A region of highest plasma density is at the beam axis and workpieces having surfaces to be coated, are radially offset from, and extend along the axis with the surfaces facing the axis and being in the container. Fresh reactive gas is inlet into the container and consumed gas is removed from the container. Coating material is deposited upon the surfaces with a deposition rate of at least 400 nm/min and at a maximum temperature of the surfaces being 550° C.
Claims29
A method for coating workpieces comprising the steps of:
- generating a beam of a plasma in an evacuated container having, along an axis of said beam, a region of highest plasma density;
- disposing workpieces having surfaces to be coated, radially offset from, and extending along said axis with said surfaces facing said axis;
- inletting fresh reactive gas into said container and removing consumed gas from said container;
- and
- depositing coating material upon said surfaces with a deposition rate of at least 400 nm/min and at a maximum temperature of said surfaces of 550° C.
Dependencies are inferred from the claim text.