Method of manufacturing electron-emitting device, electron source and image-forming apparatus

A method of manufacturing a plurality of electron-emitting devices each having an electroconductive film including an electron-emitting region arranged between a pair of device electrodes on a substrate, comprising a process of forming a plurality of electroconductive films in which electron-emitting regions are to be formed, said process comprising the steps of:

• forming a plurality of pairs of device electrodes, each pair being disposed with a space therebetween;
• then applying a liquid droplet or droplets containing a precursor material of the electroconductive films to be formed, to the space between each pair of device electrodes by an ink-jet method and drying the liquid droplet or droplets applied in the applying to make precursor films of the electroconductive films;
• thereafter observing as an image peripheral profiles in a shape of the precursor films to identify defects;
• and
• thereafter heating the precursor films if there is no defect.

A method of forming on a substrate a film through which electrons flow, the method comprising the steps of:

• applying a liquid droplet or droplets containing a precursor material of the film to be formed to a desired portion on the substrate by an ink-jet method and drying the liquid droplet or droplets applied in the applying to make a precursor of the film;
• thereafter observing as an image a peripheral profile in a shape of the precursor film to identify defects;
• and
• thereafter heating the precursor film if there is no defect.

A method of forming on a substrate a plurality of films through each of which electrons flow, the method comprising the steps of:

• applying a liquid droplet or droplets containing a precursor material of the films to be formed to each of a plurality of desired portions on the substrate by an ink-jet method and drying the liquid droplet or droplets applied in the applying to make precursor films of the films;
• thereafter observing as an image a peripheral profile in a shape of the precursor films to identify defects;
• and
• thereafter heating the precursor films if there is no defect.

A method of forming a film on an electrode, the method comprising the steps of:

• applying a liquid droplet or droplets containing a precursor material of the film to be formed onto the electrode by an ink-jet method and drying the liquid droplet or droplets applied in the applying to make a precursor film of the film;
• thereafter observing as an image a peripheral profile in a shape of the precursor film to identify defects;
• and
• thereafter heating the precursor film if there is no defect.

A method of forming a plurality of films on electrodes, the method comprising the steps of:

• applying a liquid droplet or droplets containing a precursor material of the films to be formed onto each of the electrodes by an ink-jet method and drying the liquid droplet or droplets applied in the applying to make precursor films of the films;
• thereafter observing as an image a peripheral profiles in a shape of the precursor films to identify defects;
• and
• thereafter heating the precursor films if there is no defect.