Thermophoretic particle removing system
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsRuei-Hung Jang, Chih-Lin Ying, Tien-Hsing Woo, Shan-Hua Wu, Ming-Kuo Yu
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsRuei-Hung Jang, Chih-Lin Ying, Tien-Hsing Woo, Shan-Hua Wu, Ming-Kuo Yu
Estimating the term…
A method and apparatus for carrying out a method for thermophoretically removing particles from a particulate containing liquid the method including providing a heated turbulent flowing particulate contain liquid through a first conduit; redirecting a portion of the particulate containing liquid through a second conduit to provide laminar flow having a flow direction substantially parallel to the first conduit; forming a thermal gradient in said second conduit substantially perpendicular to the flow direction; concentrating particles in the particulate containing liquid in a portion of the second conduit aided at least in part by thermophoretic forces; and, separating the particulate containing liquid into at least a relatively concentrated particle containing portion and a relatively unconcentrated particle containing portion.
A method for thermophoretically removing particles from a particulate containing liquid comprising:
Dependencies are inferred from the claim text.