Plasma treatment of processing gases

A method of treating a first gas, the method comprising:

• a) energizing a first dielectric barrier discharge (DBD) cell including:
• a substantially cylindrical dielectric tube having (1) an inside, (2) an outside surface, (3) a first electrically conductive electrode positioned on the outside surface of the tube and encircling the tube, and (4) a second electrically conductive electrode positioned on the outside surface of the tube and encircling the tube, wherein (i) the second electrode is positioned a distance D from the first electrode and (ii) the first and second electrodes are placed in a side-by-side position;
• b) flowing the first gas through the inside of the tube;
• and
• c) generating a first plasma in the first gas through dielectric barrier discharge inside the tube, wherein a first treated gas is formed.