Variable efficiency faraday shield
AssigneeApplied Materials, Inc.
InventorsMatthew F. Davis, Frank Hooshdaran
Life of this patent
Estimating the term…
Abstract
A Faraday shield for use with a plasma reactor has a variable shielding efficiency. The shield is divided into numerous shield segments that may each be selectively grounded or ungrounded. The rate of transition between fully ungrounded and fully grounded states is controllable so as to maintain stable plasma conditions in the plasma reactor during the transitional period. The time rate of change of the shielding efficiency can be controlled at a predetermined rate once plasma strike is achieved, or can be made conditional to successful matching at the previous shield setting. When the Faraday shield is fully grounded, the amount of on-wafer and on-chamber contamination is reduced by reducing the rate of sputtering of chamber surfaces.
Claims8
A shield for providing electrical shielding at a variable efficiency, the shield comprising:
- a common node;
- plural shield segments spaced apart from one another and grouped together in plural platoons;
- plural switches, each of the plural switches being connected between the common node and a respective one of the plural shield segments, so that closure of the switch connects its respective one of the plural shield segments to the common node;
- and
- multiplexing circuitry connected to each of the plural switches to control opening and closing of the switches such that one shield segment in each of the plural platoons is connected to the common node at the same time.
The shield of wherein the plural shield segments are arranged radially in a “pie slice” configuration.
A shielding system for providing electrical shielding at a variable efficiency, the shielding system comprising:
- a shield;
- and
- a control interface connected to the shield;
- wherein the shield comprises:
- a common node;
- plural shield segments spaced apart from one another and grouped together in plural platoons;
- plural switches, each of the plural switches being connected between the common node and a respective one of the plural shield segments, so that closure of the switch connects its respective one of the plural shield segments to the common node;
- and
- multiplexing circuitry connected to each of the plural switches to control opening and closing of the switches such that one shield segment in each of the plural platoons is connected to the common node at the same time;
- and
- wherein the control interface comprises:
- a ground circuit connecting the common node to ground potential;
- and
- an incremental command circuit connected to each of the plural switches and generating command signals to selectively close the plural switches based upon occurrence of one or more conditions precedent.
Dependencies are inferred from the claim text.