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US 6,685,539 B1Granted
Processing tool, method of producing tool, processing method and processing apparatus
AssigneeRicoh Company, Ltd.
InventorsToshiyuki Enomoto, Yasuhiro Tani, Shigeru Inoue
Life of this patent
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Abstract
A processing tool is used to carry out a fixed-abrasive grinding process on a surface of a silicon work-piece. The processing tool includes abrasive grains made up silica grains. A primary average grain size of the silica grains is desirably 0.8 nm to 10 μm.
Claims9
A processing system comprising:
- a processing tool in combination with a silicon work-piece, the processing tool being for carrying out a fixed-abrasive grinding process on a surface of the silicon work-piece, and the processing tool including abrasive grains made up of silica grains such that when the fixed-abrasive process is being performed on the surface of the silicon work-piece, a dry mechano-chemical reaction occurs between the abrasive grains and the silicon work-piece so that the processing tool processes the silicon work-piece without supplying a processing fluid or coolant.
A method for carrying out a fixed-abrasive grinding on a surface of a silicon work-piece, the method comprising the steps of:
- positioning the silicon work-piece relative to a processing tool having abrasive grains made up of silica grains;
- and
- processing the surface of the silicon work-piece by the abrasive grains of the processing tool such that when the fixed-abrasive process is being performed on the surface of the silicon work-piece, a dry mechano-chemical reaction occurs between the abrasive grains and the silicon work-piece so that the processing tool processes the silicon work-piece without supplying a processing fluid or coolant.
A processing tool and silicon work-piece in combination, comprising:
- the processing tool for carrying out a fixed-abrasive grinding process on a surface of the silicon work-piece, wherein the processing tool includes abrasive grains made up of silica grains such that when the fixed-abrasive grinding process is being performed on the surface of the silicon work-piece, a dry mechano-chemical reaction occurs between the abrasive grains and the silicon work-piece so that the processing tool processes the silicon work-piece without supplying a processing fluid or coolant.
Dependencies are inferred from the claim text.