Method of fabricating capillary discharge plasma display panel using lift-off process
AssigneePlasmion Displays, LLC
InventorsSteven Kim, Geun Young Yeom, Young-Joon Lee
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Abstract
A method for fabricating a PDP is disclosed. The method for fabricating a PDP including the steps of preparing first and second panels for connecting with each other, forming at least one electrode on the first panel, forming a dielectric layer of PbO on the first panel, sequentially forming Cr and Ni on the PbO layer as a mask material of the PbO layer, performing photolithography and lift-off processes on the Ni/Cr layers to form a mask pattern of Ni/Cr, and etching the PbO layer using the mask pattern of Ni/Cr to form at least one capillary tube within the PbO layer to expose the electrode.
Claims19
A method for fabricating a plasma display panel having first and second panels, the method comprising the steps of:
- forming at least one electrode on the first panel;
- forming a dielectric layer of PbO on the first panel;
- sequentially forming Cr and Ni layers on the PbO layer as a mask of the PbO layer;
- performing photolithography and lift-off processes on the Cr and Ni layers to form a mask pattern of the Cr and Ni;
- and
- etching the PbO layer using the mask pattern of Ni/Cr to form at least one capillary tube within the PbO layer to expose the electrode.
A method for fabricating a PDP comprising the steps of:
- preparing a first and second panels;
- depositing a dielectric layer on a first panel;
- depositing at least one film on the dielectric layer;
- forming a photoresist pattern on the film;
- performing a lift-off process of the film;
- and
- forming at least one channel within the dielectric layer.
Dependencies are inferred from the claim text.