Flextensional transducer and method of forming a flextensional transducer
AssigneeHewlett-Packard Development Company, L.P.
InventorsCharles Craig Haluzak, Timothy E Beerling
Life of this patent
Estimating the term…
Abstract
A flextensional transducer includes a substrate having an etch stop layer interposed between a first layer and a second layer, a flexible membrane supported by the second layer of the substrate and having an orifice defined therein, and an actuator provided on the flexible membrane and adapted to deflect the flexible membrane. The substrate has an opening formed through the first layer and a hole formed through the etch stop layer and the second layer such that the hole through the etch stop layer and the second layer of the substrate communicates with the opening through the first layer of the substrate and the orifice in the flexible membrane.
Claims35
A flextensional transducer, comprising:
- a substrate including an etch stop layer interposed between a first layer and a second layer;
- a flexible membrane supported by the second layer of the substrate and having an orifice defined therein;
- and
- an actuator provided on the flexible membrane and adapted to deflect the flexible membrane,
- wherein the substrate has an opening formed through the first layer and a hole formed through the etch stop layer and the second layer, wherein the hole through the etch stop layer and the second layer of the substrate communicates with the opening through the first layer of the substrate and the orifice in the flexible membrane.
A method of forming a flextensional transducer, the method comprising:
- forming a flexible membrane with an orifice therein on a second layer of a substrate, wherein the substrate includes an etch stop layer interposed between a first layer and the second layer;
- forming an actuator over the flexible membrane, wherein the actuator is adapted to deflect the flexible membrane;
- etching through the first layer of the substrate to the etch stop layer of the substrate, including forming an opening through the first layer;
- and
- etching through the etch stop layer and the second layer of the substrate from the opening through the first layer of the substrate to the flexible membrane, including forming a hole through the etch stop layer and the second layer and communicating the hole with the opening through the first layer and the orifice of the flexible membrane.
A fluid ejection device, comprising:
- a substrate including a third layer interposed between a first layer and a second layer;
- a plurality of flexible membrane portions each supported by the second layer of the substrate and having an orifice defined therein;
- and
- a plurality of actuators each provided on a respective one of the flexible membrane portions and adapted to deflect the respective one of the flexible membrane portions,
- wherein the substrate has a fluid feed plenum formed in the first layer and a plurality of fluid feed holes each formed in the third layer and the second layer, wherein each of the fluid feed holes communicates with the fluid feed plenum and the orifice of one of the flexible membrane portions.
Dependencies are inferred from the claim text.