Control valve and diaphragm for use in the control valve

Abstract

The control valve according to the present invention has a high durability, so that the valve is not easily damaged even in case that the valve is provided in a corrosion gas current path. The valve has a construction such that a diaphragm (4) is contained in the valve body (2), which has a valve chamber (23) between the gas current in path (25) and the gas current out path (26). The diaphragm 4 is urged against an opening (252) formed in the center of the valve seat 231 in the valve chamber (23) to open and close the opening. The valve has a valve control member (5), which has a clamping member (3) to clamp the diaphragm and is made to contact to the diaphragm from outside to open and close the opening. The diaphragm has an urging member (41) made of ceramic, which is fixed to the opening (252) side of the diaphragm so that the resistance to corrosion of the diaphragm is improved.

Dependencies are inferred from the claim text.