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US 6,684,638 B2Granted
Microactuator arrangement
AssigneeFraunhofer Gesellschaft zur angewandten Forderung der Forschung e.V.
InventorsHans Joachim Quenzer, Bernd Wagner
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AssigneeFraunhofer Gesellschaft zur angewandten Forderung der Forschung e.V.
InventorsHans Joachim Quenzer, Bernd Wagner
Estimating the term…
The invention relates to a micro reactor arrangement, particularly for a micro relay. It comprises a substrate (1) with two thermomechanical micro actuators (3, 4). In response to thermal stimulation, the first micro actuator (3) performs a movement in parallel with the substrate surface (2), while the second micro actuator moves in a direction orthogonal on the substrate surface (2). Both thermomechanical micro actuators are so disposed relative to each other that the first micro actuator (3), in the extended state, reaches under the second micro actuator (4). With these provisions, the first micro actuator (3) can be maintained in this position without supply of power when the second micro actuator (4) is de-energized. With the present micro actuator arrangement, one can achieve the advantages of a high activation force and long positioning travels of thermomechanical micro actuators for micro relays, without the necessity to supply energy for maintaining the individual switching states.
Micro actuator arrangement, comprising a substrate on which a first thermomechanical micro actuator and a second thermomechanical micro actuator are disposed, with said first thermomechanical micro actuator, in response to thermal stimulation, being extended in a direction substantially parallel with a surface of said substrate, wherein said second thermomechanical micro actuator is so configured and disposed relative to said first thermomechanical micro thermomechanical micro actuator is extended substantially in a direction orthogonal on the surface of said substrate and that, in an extended state, a first section of said first thermomechanical micro actuator reaches under a second section of said second thermomechanical micro actuator.
Dependencies are inferred from the claim text.