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US 6,682,339 B2Granted
Flame stabilizer for flame hydrolysis deposition
AssigneeSamsung Electronic Co., Ltd.
InventorJae-Geol Cho
Life of this patent
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Abstract
A flame stabilizing apparatus is disclosed for application to a burner for a flame hydrolysis deposition (FHD) process. In the flame stabilizing apparatus, a co-flow diffusion flame burner emits a flame onto a substrate and a flame stabilizer, installed around the burner coaxially, isolates the emitted flame from an instable ambient flow to stabilize the flame and a particle flow.
Claims10
A flame stabilizing apparatus comprising:
- a co-flow diffusion flame burner for emitting a flame onto a substrate in a flame hydrolysis deposition (FHD) process;
- and
- a flame stabilizer juxtaposed to the burner for isolating the emitted flame from an unstable ambient flow by blocking air flow in a substantially perpendicular direction relative to a direction of the emitted flame to stabilize the emitted flame and a particle flow by emitting an inert gas that is not involved in flame hydrolysis in substantially the same direction of the flame to surround at least a portion of the flame.
A flame stabilizing apparatus comprising:
- a co-flow diffusion flame burner for emitting a flame onto a substrate in a flame hydrolysis deposition (FHD) process;
- and
- flame stabilizer means for isolating the emitted flame from an unstable ambient flow to stabilize the flame by blocking air flow in a substantially perpendicular direction relative to a direction of the emitted flame and a particle flow by emitting an inert gas that surrounds the emitted flame and that is not involved in flame hydrolysis.
A method for stabilizing a flame from an unstable ambient flow and particle flow, said method comprising the steps of:
- inserting source materials into a center of a co-flow diffusion flame burner;
- inserting an inert gas by a flame stabilizer that is not involved in a flame hydrolysis through a plurality of channels juxtaposed to the center of the burner;
- and
- allowing the inert gas to develop into a flow in the same direction as an emitted flame to blocking air flow in a substantially perpendicular direction relative to a direction of the emitted flame.
1 more element
Dependencies are inferred from the claim text.