Ejector
AssigneeEbara Corporation
InventorTakashi Kyotani
Life of this patent
Estimating the term…
Abstract
An ejector is provided with an interior surface wetting device for introducing a cleaning liquid into a suction chamber of the ejector to form a thin wall of the cleaning liquid covering an interior surface of the ejector. The interior surface wetting device includes a cleaning liquid inlet opening to be fluidly connected to a source of cleaning liquid and a cleaning liquid outlet opening for introducing the cleaning liquid into a suction chamber. The wetting device may be in the form of a pipe which extends from the outside of the ejector into the suction chamber to supply a cleaning liquid to a desired portion in the suction chamber.
Claims12
An ejector comprising:
- an ejector body having a suction chamber therein, a fluid outlet for allowing a fluid in the suction chamber to exit the suction chamber and a fluid inlet for allowing a fluid to flow into the suction chamber,
- a nozzle provided in the suction chamber for directing a jet of a drive fluid towards the fluid outlet to induce a flow of fluid exiting the suction chamber through the fluid outlet, thereby creating a negative pressure in the suction chamber, and
- an interior surface wetting device provided on the ejector body, the interior surface wetting device comprising a cleaning liquid inlet opening to be fluidly connected to a source of cleaning liquid and a cleaning liquid outlet opening for introducing the cleaning liquid into the suction chamber to form a thin wall of the cleaning liquid covering an interior surface of the suction chamber and/or an interior surface of the fluid outlet.
An ejector comprising:
- an ejector body having a suction chamber therein, a fluid outlet for allowing a fluid in the suction chamber to exit the suction chamber and a fluid inlet for allowing a fluid to flow into the suction chamber
- a nozzle provided in the suction chamber for directing a jet of a drive fluid towards the fluid outlet of the suction chamber to induce a flow of fluid exiting the suction chamber through the fluid outlet, thereby creating a negative pressure in the suction chamber, and
- an interior surface wetting device having a cleaning liquid introduction pipe extending from an outside of the ejector body into the suction chamber such that the cleaning liquid introduction pipe introduces a cleaning liquid into the suction chamber to form a thin wall of the cleaning liquid over an interior surface of the suction chamber and/or an interior surface of the fluid outlet.
Dependencies are inferred from the claim text.