Piezoelectric sensor
OwnerPeter Apelinventor
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Abstract
A piezoelectric sensor includes a carrier, a piezoelectric measurement sensing element arranged on the carrier, a covering layer covering the measurement sensing element and an electronic evaluation unit. The measurement sensing element is formed by a piezoelectric layer. The carrier has a first contact layer electrically connected to the piezoelectric layer and the covering layer has a second contact layer electrically connected to the piezoelectric layer. The electronic evaluation unit is able to determine a mechanical loading of the piezoelectric layer by evaluating the difference of electrical potential between the first contact layer and the second contact layer.
Claims20
A piezoelectric sensor comprising a carrier, a piezoelectric measurement sensing element arranged on the carrier, a covering layer covering the measurement sensing element and an electronic evaluation unit, the measurement sensing element being formed by a piezoelectric layer, the carrier having a first contact layer electrically connected to the piezoelectric layer, the covering layer having a second contact layer electrically connected to the piezoelectric layer and the electronic evaluation unit being able to determine a mechanical loading of the piezoelectric layer by evaluating the difference of electric potential between the first contact layer and the second contact layer, wherein the sensor together with the electronic evaluation unit is configured to have the thickness of a film, the piezoelectric layer having a thickness of less than 1 mm and the electronic evaluation unit being arranged beside the measurement sensing element on the film-like carrier which is manufactured from an elastic material which damps vibrations to only a slight degree.
Dependencies are inferred from the claim text.