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OwnerMuradin Abubekirovich Kumakhovinventor
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The invention makes possible to increase the degree of radiation focusing by the lens, to use particles of higher energies, and to increase the coefficients, depending on these factors, of the devices, the lens is used in. Thus the sublens 18 of the least degree of integration represents a package of the channels 5, which is growing out of joint drawing and forming the capillaries, which are laid in a bundle. The sublens of each higher degree of integration represents a package of sublenses of the previous degree of integration, which is growing out of their joint drawing and forming. The sublenses are growing out of performing the said operations at the pressure of the gaseous medium inside the channels being higher than the pressure in the space between the sublenses of the previous degree of integration and at the temperature of their material softening and splicing the walls. To produce the lenses a bundle of stocks (capillaries) in a tubular envelope is fed to the furnace (at the first stage) or stocks, produced on the previous degree, and the bundle is drawing from the furnace at the speed, exceeding the speed of feeding. The product is cut off on stocks for the next stage, and at the final stage the product is formed by varying the drawing speed, after what the parts with formed barrel-shaped thickenings are cut of.
A lens for transforming a radiation, representing a neutral or charged particle flux, comprising radiation transporting channels, adjoining their walls, with total external reflection and oriented by the input ends so that to capture the radiation of the source in use, wherein,
An analytical device, comprising a radiation source, representing a neutral or charged particle flux, a means for placing the object under study placing with a capability of being acted by a radiation of the said, one or more detectors of radiation, placed with a capability of being acted by a radiation, transmitted through the object under study or excited in it, one or more lenses for transforming the radiation of the said source or the radiation, excited in the object under study, the said lenses being placed on the radiation way from the said source to the object under study and on the way from the latter to one or some said radiation detectors, the said lenses comprise the channels, adjoining their walls, for the radiation transporting with total external reflection, the said channels are oriented by their input ends with a capability to capture the radiation, wherein
A device for radiotherapy, comprising one or more radiation sources, representing a neutral or charged particle flux, and the means for patient's body or its part positioning to be irradiated, wherein the lens for radiation focusing on the patient's tumor is placed between each of the said sources and the said means for positioning, the said lens comprises channels, adjoining their walls, for radiation transporting with the total external reflection, the said channels are oriented by their input ends with a capability to capture the transported radiation, the said lens is made as a package of sublenses of various degree of integration, thus a sublens of the least degree of integration represents a package of the radiation transporting channels, which is growing out of joint drawing and forming the capillary bundle at the pressure of the gaseous medium in the space between them being less than the pressure in the channels of capillaries and the temperature of the material softening and splicing the neighboring capillaries, the sublens of each higher degree of integration represents the package of sublenses of the previous degree of integration, which is growing out of their joint drawing and forming at the pressure of the gaseous medium in the space between them being less than the pressure inside the channels of sublenses and at the temperature of the material softening and splicing the neighboring sublenses, all sublenses of the highest degree of integration are combined in an unified structure, which is growing out of their joint drawing and forming at the pressure of the gaseous medium in the space between them being less than the pressure in the channels of sublenses and at the temperature of the material softening and splicing the neighboring sublenses and at change of drawing speed to form of barrel-shaped thickenings, the ends of the said unified structure are cut off and form an input and output faces of the lens.
A device for contact X-ray lithography, comprising the soft X-ray source, the lens for transforming the divergent radiation of the said source to quasi-parallel, the said lens comprises the channels, adjoining their walls, for radiation transporting with total external reflection, and the means for the mask and substrate with the resist, coated on it, placing, wherein the said lens is made as a package of sublenses of various degrees of integration, thus the sublens of the least degree of integration represents the package in a common envelope of radiation transporting channels, which is growing out of joint drawing and forming the capillary bundle at the pressure of the gaseous medium in the space between them being less than the pressure in the channels of capillaries and at the temperature of the material softening and splicing the neighboring capillaries, each sublens of the higher degree of integration represents the package of sublenses of the previous degree of integration, which is growing out of their joint drawing and forming at the pressure of the gaseous medium in the space between them being less than the pressure in the channels of sublenses and at the temperature of the material softening and splicing the neighboring sublenses, all sublenses of the highest degree of integration are combined in a unified structure, which is growing out of their joint drawing and forming at the pressure of the gaseous medium in the space between them being less than the pressure in the channels of sublenses and at the temperature of the material softening and splicing the neighboring sublenses and at change of drawing speed to form of barrel-shaped thickenings, the ends of the said unified structure are cut off and form an input and output faces of the lens.
A device for projection X-ray lithography, comprising the soft X-ray source, the lens for transforming the divergent radiation of the said source to quasi-parallel, which is intended for the mask irradiating, a means for the mask locating, the lens for transforming the X-ray image of the mask with decreasing size on the resist, the means for the substrate with resist, coated on it, locating, thus both said lenses comprise channels, adjoining their walls, for radiation transporting with the total external reflection, wherein at least on of the said lenses is made as a package of sublenses of various degree of integration, thus the sublens of the least degree of integration represents a package of the radiation transporting channels, which growing out of joint drawing and forming the capillary bundle at the pressure of the gaseous medium in the space between them being less than the pressure in the channels of capillaries and at the temperature of the material softening and splicing of the neighboring capillaries, the sublens of each higher degree of integration represents a package of sublenses of the previous degree of integration, which is growing out of their joint drawing and forming at the pressure of the gaseous medium in the space between them being less than the pressure in the channels of sublenses and at the temperature of the material softening and splicing the neighboring sublenses, all sublenses of the highest degree of integration are combined in a unified structure, which is growing out of their joint drawing and forming at the pressure of the gaseous medium in the space between them being less than the pressure in the channels of sublenses and at the temperature of the material softening and splicing the neighboring sublenses and at change of drawing speed to form of barrel-shaped thickenings, the ends of the said unified structure are cut off and form an input and output faces of the lens, thus the input diameters of the radiation transporting channels of the second of the said lenses exceed the output diameters.
Dependencies are inferred from the claim text.