Method of data compression using principal components analysis
AssigneeAdvanced Micro Devices, Inc.
InventorsAnthony John Toprac, Hongyu Yue
Life of this patent
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Abstract
A method is provided for compressing data. The method includes collecting data representative of a process. The method further includes scaling at least a portion of the collected data to generate mean values and mean-scaled values for the collected data. The method also includes calculating Scores from the mean-scaled values for the collected data using at most first, second, third and fourth Principal Components derived from a model using archived data sets and saving the Scores and the mean values.
Claims40
A method for compressing data, the method comprising:
- collecting data, representative of a process;
- scaling at least a portion of the collected data to generate mean values and mean-scaled values for the collected data;
- calculating Scores from the mean-scaled values for the collected data using at most first, second, third and fourth Principal Components derived from a model using archived data sets;
- and
- saving the Scores and the mean values.
A computer-readable, program storage device encoded with instructions that, when executed by a computer, perform a method, the method comprising:
- collecting data representative of a process;
- scaling at least a portion of the collected data to generate mean values and mean-scaled values for the collected data;
- calculating Scores from the mean-scaled values for the collected data using at most first, second, third and fourth Principal Components derived from a model using archived data sets;
- and
- saving the Scores and the mean values.
A computer programmed to perform a method, the method comprising:
- collecting data representative of a process;
- scaling at least a portion of the collected data to generate mean values and mean-scaled values for the collected data;
- calculating Scores from the mean-scaled values for the collected data using at most first, second, third and fourth Principal Components derived from a model using archived data sets;
- and
- saving the Scores and the mean values.
A method of compressing optical emission spectroscopy data collected during an etching process, comprising:
- scaling at least a portion of the collected data to generate mean values and mean-scaled values for the collected data;
- calculating approximate Scores from the mean-scaled values for the collected data using a plurality of principal components derived from archived optical emission spectroscopy data sets;
- and
- storing the approximate Scores and mean values as compressed optical emission spectroscopy data.
A computer-readable, program storage device encoded with instructions that, when executed by a computer, perform a method, the method comprising:
- scaling at least a portion of data collected during an etching process to generate mean values and mean-scaled values for the collected data;
- calculating approximate Scores from the mean-scaled values for the collected data using a plurality of principal components derived from archived optical emission spectroscopy data sets;
- and
- storing the approximate Scores and mean values as compressed optical emission spectroscopy data.
Dependencies are inferred from the claim text.