Needle-card adjusting device for planarizing needle sets on a needle card
AssigneeInfineon Technologies AG
InventorMichael Kund
Life of this patent
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Abstract
A needle-card adjusting device for planarizing needle sets on a needle card, in which the needle card is connected to a circuit board used as a contact interface to a test head. The needle-card adjusting device has a separate, dynamically operating adjusting unit for adjusting the needle-card.
Claims10
In combination with a needle card assembly having a needle-card with a plurality of needle sets, a test head, and a circuit board functioning as a contact interface to the test head, a needle-card adjusting device for planarizing the needle sets on the needle card in relation to a wafer with which contact is to be made, the needle-card adjusting device comprising:
- a separate, dynamically operating adjusting unit connecting the needle card to the circuit board;
- a sense line;
- an active line;
- and
- a control unit connected to said dynamically operating adjusting unit through said sense line and said active line for controlling said dynamically operating adjusting unit.
A needle-card assembly, comprising:
- a needle-card having a plurality of needles for making contact with a wafer;
- a test head;
- a circuit board functioning as a contact interface with said test head;
- a dynamically operating adjusting unit connecting said circuit board to said needle-card so that said needles are planarized with respect to the wafer;
- a sense line;
- an active line;
- and
- a control unit connected to said dynamically operating adjusting unit through said sense line and said active line for controlling said dynamically operating adjusting unit.
Dependencies are inferred from the claim text.