Travelling wave-type optical modulator
AssigneeNGK Insulators, Ltd.
InventorsAtsuo Kondo, Jungo Kondo, Kenji Aoki, Osamu Mitomi
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Abstract
A travelling wave-type optical modulator has a supporting substrate and a ferroelectric single crystalline layer on the supporting substrate. The ferroelectric single crystalline layer has thicker parts and thinner parts within the modulating region of the travelling wave-type optical modulator when viewed in the cross section of the modulating region. An optical waveguide is formed in the thicker part of the ferroelectric single crystalline layer, and electrodes for modulation are provided on the thinner part of the ferroelectric single crystalline layer between the adjacent thicker parts.
Claims28
A travelling wave-type optical modulator, comprising:
- a supporting substrate;
- a ferroelectric single crystalline layer positioned on the supporting, and having thicker parts and thinner parts within the modulating region of the travelling wave-type optical modulator when viewed in the cross section of the modulating region;
- an optical waveguide formed in the bottom area of the thicker part adjacent to the supporting substrate, and
- electrodes for modulation, each of the electrodes being provided on the thinner part of the ferroelectric single crystalline layer between the adjacent thicker parts;
- wherein the position of the optical waveguide decreases the product (Vπ·L), with Vπ being operating voltage and L being electrode length.
A method for manufacturing a travelling wave-type optical modulator, comprising the steps of:
- preparing a substrate comprising a ferroelectric single crystalline material;
- forming an optical waveguide in the substrate;
- adhering the substrate to a supporting substrate;
- processing the substrate to form thicker parts and thinner parts, when viewed in the cross section of the modulating region, within the modulating region of the travelling wave-type optical modulator, and positioning the optical waveguide in the bottom area of the thicker part adjacent the supporting substrate;
- and
- providing electrodes for modulation, each of the electrodes being positioned on the thinner part between the adjacent thicker parts of the ferroelectric single crystalline layer;
- wherein the position of the optical waveguide decreases the product (Vπ·L), with Vπ being operating voltage and L being electrode length.
A travelling wave-type optical modulator, comprising:
- a supporting substrate;
- ferroelectric single crystalline portions positioned on the supporting substrate, each of the ferroelectric single crystalline portions being separated within the modulating region of the travelling wave-type optical modulator when viewed in the cross section of the modulating region;
- an optical waveguide formed in the bottom area of the ferroelectric single crystalline portion adjacent the supporting substrate;
- and
- electrodes for modulation, each of the electrodes being provided between adjacent ferroelectric single crystalline portions on the supporting substrate;
- wherein the position of the optical waveguide decreases the product (Vπ·L), with Vπ being operating voltage and L being electrode length.
A method for manufacturing traveling wave-type optical modulator comprising the steps of:
- preparing a substrate comprising a ferroelectric single crystalline material;
- forming an optical waveguide in the substrate;
- adhering the substrate to a supporting substrate;
- processing the substrate to fabricate ferroelectric single crystalline portions, each of the ferroelectric single crystalline portions being separated within the modulating region of the travelling wave-type optical modulator when viewed in the cross section of the modulating region, and forming the optical waveguide in the bottom area of the ferroelectric single crystalline portion adjacent the supporting substrate;
- and
- providing electrodes for modulation, each of the electrodes being positioned between adjacent ferroelectric single crystalline portions;
- wherein the position of the optical waveguide decreases the product (Vπ·L), with Vπ being operating voltage and L being electrode length.
Dependencies are inferred from the claim text.