US 6,674,524 B2 · Arrangement for the visual inspection of substrates

Abstract

An arrangement for the visual inspection of substrates (S) comprises a microscope (2) for viewing the substrate (S) present at an inspection point (I); at least one viewing field (11), arranged next to a microscope viewing port (2a), for viewing an image or an image area of the substrate (S); and/or at least one further viewing field (12), arranged next to the microscope viewing port (2a), for direct viewing of the substrate (S) or a portion of the substrate (S); the microscope viewing port (2a) and the viewing fields (11, 12) being arranged with respect to an operating position (P) in such a way that from the operating position (P), the viewer looks in a first viewing direction (A) perpendicularly onto the microscope viewing port (2a), and in at least one further viewing direction (B, B′) approximately perpendicularly in each case onto one of the viewing fields (11, 12). The first viewing direction (A) and the viewing directions (B, B′) enclose acute angles (α, α′). The result is to create an inspection arrangement notable for favorable ergonomic properties and a compact design.

Claims20

Dependent claims

An arrangement for the visual inspection of substrates, comprising

a microscope (2) for viewing the substrate (S) present at an inspection point (I);
at least one viewing field (11), arranged next to a microscope viewing port (2a), for viewing an image or an image area of the substrate (S);
and/or
at least one further viewing field (12), arranged next to the microscope viewing port (2a), for direct viewing of the substrate (S) or a portion of the substrate (S);
the microscope viewing port (2a) and the viewing fields (11, 12) being arranged with respect to an operating position (P) in such a way that from the operating position (P), the viewer looks in a first viewing direction (A) perpendicularly onto the microscope viewing port (2a), and in at least one further viewing direction (B, B′) approximately perpendicularly in each case onto one of the viewing fields (11, 12);
and the first viewing direction (A) enclosing an acute angle (α, α′) in each case with the further viewing direction or directions (B, B′).

3 more elements

An arrangement for the visual inspection of substrates, comprising:

a microscope for viewing at least one substrate present at an inspection point (I);
at least one of a first viewing field, arranged next to a microscope viewing port, for viewing an image or an image area of the at least one substrate and a second viewing field, arranged next to the microscope viewing port, for direct viewing of the at least one substrate or a portion of the at least one substrate;
the microscope viewing port and the at least one of the first and second viewing fields being arranged with respect to an operating position (P) in such a way that from the operating position (P), the viewer looks in a first viewing direction (A) perpendicularly onto the microscope viewing port, and in at least one of a second viewing direction (B) and a third viewing direction (B′) approximately perpendicularly onto at least one of the first and second viewing fields, respectively;
and the first viewing direction (A) enclosing an acute angle with at least one of the second and third viewing directions (B, B′).

1 more element

Dependencies are inferred from the claim text.

Arrangement for the visual inspection of substrates

Life of this patent

Arrangement for the visual inspection of substrates

Life of this patent

Abstract

Claims20