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US 6,674,514 B2Granted
Illumination optical system in exposure apparatus
AssigneeCanon Kabushiki Kaisha
InventorKen-ichiro Shinoda
Life of this patent
Estimating the term…
Abstract
An optical system includes an internal reflection type optical member for changing a direction of advancement of an approximately linearly polarized light on the basis of total reflection and a depolarizing member for dissolving linear polarization of light emitted from the optical member.
Claims19
An optical system, comprising:
- an internal reflection type optical member for changing a direction of advancement of an approximately linearly polarized light on the basis of total reflection;
- and
- a depolarizing member for dissolving linear polarization of light emitted from said optical member,
- wherein said optical member has a light entrance surface arranged so that a P-polarized component is incident thereon with a Brewster angle.
1 more element
An optical system, comprising:
- an internal reflection type optical member for changing a direction of advancement of an approximately linearly polarized light on the basis of total reflection;
- and
- a depolarizing member for dissolving linear polarization of light emitted from said optical member,
- wherein said optical member has a light exit surface arranged so that a P-polarized component is emitted therefrom with a Brewster angle.
1 more element
An optical system, comprising:
- an internal reflection type optical member for changing a direction of advancement of an approximately linearly polarized light on the basis of total reflection;
- and
- a depolarizing member for dissolving linear polarization of light emitted from said optical member,
- wherein, when an angle defined between a light entrance surface and a light exit surface of said optical member is θ and an incidence angle of light incident on a reflection surface of said optical member is A2, said optical member satisfies a relation:
- θ+2·A2=180 (deg).
2 more elements
An optical system, comprising:
- an internal reflection type optical member for changing a direction of advancement of an approximately linearly polarized light on the basis of total reflection;
- and
- a depolarizing member for dissolving linear polarization of light emitted from said optical member,
- wherein the approximately linearly polarized light to be deflected by said optical member has an opening angle at one side not greater than 3 deg.
1 more element
An optical system, comprising:
- an internal reflection type optical member for changing a direction of advancement of an approximately linearly polarized light on the basis of total reflection;
- and
- a depolarizing member for dissolving linear polarization of light emitted from said optical member,
- wherein said optical member has a light entrance surface and a light exit surface each having an anti-reflection film formed thereon.
1 more element
An optical system, comprising:
- an internal reflection type optical member for changing a direction of advancement of an approximately linearly polarized light on the basis of total reflection;
- and
- a depolarizing member for dissolving liner polarization of light emitted from said optical member,
- wherein said optical member has a light entrance surface and a light exit surface each being over-coated with a material having a refractive index lower than that of said optical member.
1 more element
An optical system, comprising:
- an internal reflection type optical member for changing a direction of advancement of an approximately linearly polarized light on the basis of total reflection;
- a depolarizing member for dissolving linear polarization of light emitted from said optical member;
- and
- a mirror having a dielectric film, wherein, for deflection of the approximately linearly polarized light, when the light is P-polarized light with respect to a light entrance surface of said mirror having the dielectric film or said optical member, said optical member is used for the deflection, and wherein, when the light is S-polarized light, said mirror is used for the deflection.
1 more element
An illumination optical, comprising:
- an internal reflection type optical member for changing a direction of advancement of an approximately linearly polarized light on the basis of total reflection;
- a depolarizing member for dissolving linear polarization of light emitted from said optical member;
- a fly's eye lens for receiving light having its linear polarization dissolved by said depolarizing member and for producing a plurality of secondary light sources at a light exit surface thereof;
- and
- a lens system for superposing light beams from the secondary light sources one upon another on a surface to be illuminated.
2 more elements
An optical system, comprising:
- an internal reflection type optical member for changing a direction of advancement of an approximately linearly polarized light on the basis of total reflection;
- and
- a depolarizing member for dissolving linear polarization of light emitted from said optical member,
- wherein said optical member has a light entrance surface arranged so that a P-polarized component is incident thereon with a Brewster angle.
1 more element
An optical system, comprising:
- an internal reflection type optical member for changing a direction of advancement of an approximately linearly polarized light on the basis of total reflection;
- and
- a depolarizing member for dissolving linear polarization of light emitted from said optical member,
- wherein said optical member has a light exit surface arranged so that a P-polarized component is emitted therefrom with a Brewster angle.
1 more element
An optical system, comprising:
- an internal reflection type optical member for changing a direction of advancement of an approximately linearly polarized light on the basis of total reflection;
- and
- a depolarizing member for dissolving linear polarization of light emitted from said optical member,
- wherein, when an angle defined between a light entrance surface and a light exit surface of said optical member is θ and an incidence angle of light incident on a reflection surface of said optical member is A2 said optical member satisfies a relation:
- θ+2·A2=180 (deg).
2 more elements
An optical system, comprising:
- an internal reflection type optical member for changing a direction of advancement of an approximately linearly polarized light on the basis of total reflection;
- and
- a depolarizing member for dissolving linear polarization of light emitted from said optical member,
- wherein the approximately linearly polarized light to be deflected by said optical member has an opening angle at one side, not greater than 3 degrees.
1 more element
An optical system, comprising:
- an internal reflection type optical member for changing a direction of advancement of an approximately linearly polarized light on the basis of total reflection;
- and
- a depolarizing member for dissolving linear polarization of light emitted from said optical member,
- wherein said optical member has a light entrance surface and a light exit surface each having an anti-reflection film formed thereon.
1 more element
An optical system, comprising:
- an internal reflection type optical member for changing a direction of advancement of an approximately linearly polarized light on the basis of total reflection;
- and
- a depolarizing member for dissolving linear polarization of light emitted from said optical member,
- wherein said optical member has a light entrance surface and a light exit surface each being over-coated with a material having a refractive index lower than that of said optical member.
1 more element
An optical system, comprising:
- an internal reflection type optical member for changing a direction of advancement of an approximately linearly polarized light on the basis of total reflection;
- a depolarizing member for dissolving linear polarization of light emitted from said optical member;
- and
- a mirror having a dielectric film, wherein, for deflection of the approximately linearly polarized light, when the light is P-polarized light with respect to a light entrance surface of said mirror having the dielectric film or said optical member, said optical member is used for the deflection, and wherein, when the light is S-polarized light, said mirror is used for the deflection.
1 more element
An exposure apparatus, comprising:
- an illumination optical system including (i) an internal reflection type optical member for changing a direction of advancement of an approximately linearly polarized light on the basis of total reflection, and (ii) a depolarizing member for dissolving linear polarization of light emitted from said optical member;
- and
- a projection optical system for projecting a pattern, formed on a surface to be illuminated by said illumination optical system, onto a substrate.
A device manufacturing method, comprising the steps of:
- illuminating a surface to be illuminated with an illumination optical system that includes (i) an internal reflection type optical member for changing a direction of advancement of an approximately linearly polarized light on the basis of total reflection, and (ii) a depolarizing member of dissolving linear polarization of light emitted from the optical member;
- and
- transferring a pattern, formed on the surface to be illuminated, onto a substrate by use of a projection optical system.
Dependencies are inferred from the claim text.