Probe card measurement tool
AssigneeAdvanced Micro Devices, Inc.
InventorsKoby L. Duckworth, Marian C. Estrada
Life of this patent
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AssigneeAdvanced Micro Devices, Inc.
InventorsKoby L. Duckworth, Marian C. Estrada
Estimating the term…
Various embodiments of a measurement tool are disclosed. In one aspect, a measurement tool is provided that includes a frame that has a first member. A second member is provided that is moveable relative to the first member along a first axis and a second axis. The first and second members have first and second cooperating structures engageable to enable the second member to be moved downward along the second axis to a preselected elevation when the second member is moved to a preselected position along the first axis. The movement of the second member along the first axis is constrained when the second member is moved to the preselected elevation. A meter is coupled to the second member for measuring feature heights. The meter has a contact surface that contacts the feature when the second member is moved to the preselected elevation. The tool provides for non-destructive probe card pin height measurement.
A measurement tool, comprising:
The measurement tool of claim of 5, wherein the feature comprises a pin array.
A measurement tool for measuring a height of features of a probe card, comprising:
A measurement tool for measuring a height of a plurality of pins a probe card, comprising:
Dependencies are inferred from the claim text.