Impedance measuring apparatus for electronic component

An impedance measuring apparatus for measuring the impedance of an electronic component by using a four-terminal method, said impedance measuring apparatus comprising:

• a first current-carrying line and a first voltage detection line which are connected to one electrode of the electronic component;
• a first resistor for connecting said first current-carrying line and said first voltage detection line;
• a second current-carrying line and a second voltage detection line which are connected to the other electrode of the electronic component;
• a second resistor for connecting said second current-carrying line and said second voltage detection line;
• a third resistor connected to a portion of said first current-carrying line between said one terminal of the electronic component and said first resistor;
• and
• a fourth resistor connected to a portion of said second current-carrying line between the other terminal of the electronic component and said second resistor;
• wherein:
• the first and second resistors each have resistance sufficiently larger than each of a first contact resistance between said one electrode of the electronic component and said first current-carrying line, a second contact resistance between the other electrode of the electronic component and said second current-carrying line, a third contact resistance between said one electrode of the electronic component and said first voltage detection line, and a fourth contact resistance between the other electrode of the electronic component and said second voltage detection line;
• the third and fourth resistors each have a resistance sufficiently smaller than each of the resistances of the first and second resistors and each have a resistance sufficiently larger than each of the first to fourth contact resistances, and have different resistances.

An impedance measuring apparatus for measuring the impedance of an electronic component by using a four-terminal method, said impedance measuring apparatus comprising:

• a first current-carrying line connected to one terminal of the electronic component;
• a first voltage detection line connected to the other terminal of the electronic component;
• a first resistor for connecting said first current-carrying line and said first voltage detection line;
• a second current-carrying line connected to the other terminal of the electronic component;
• a second voltage detection line connected to said one terminal of the electronic component;
• and
• a second resistor for connecting said second current-carrying line and said second voltage detection line,
• wherein the first and second resistors each have a resistance sufficiently larger than each of the first contact resistance between said one electrode of the electronic component and said first current-carrying line, a second contact resistance between the other electrode of the electronic component and said second current-carrying line, a third contact resistance between said one electrode of the electronic component and said first voltage detection line, and a fourth contact resistance between the other electrode of the electronic component and said second voltage detection line.