Method for measuring magnetic field based on electro-optic probing technique and measuring electric field based on magnetic probing technique
AssigneePrecision Instrument Development Center, National Science Council
InventorKuen-Wey Shieh
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Abstract
The present invention provides a method for measuring both magnetic and electric fields of a DUT via an electro-optic probing technique at the same time. Also, the present invention provides a method for measuring both electric and magnetic fields via a magneto-optic probing technique simultaneously. The method utilizes the modulation of the position of a probe to measure the electric and magnetic field signals. The DC and AC components of the modulated electric (or magnetic) field signals can be obtained by means of a low pass filter and a lock-in amplifier, respectively. Through a simple calculation, the electric and magnetic field can be obtained simultaneously.
Claims10
A method for measuring a three-dimensional magnetic-field of a DUT, comprising the steps of:
- providing an electric field probing system, which has a probe for detecting a three-dimensional electric field of said DUT;
- placing said probe above said DUT at a position;
- modulating the position of said probe around said position and detecting said electric field of said DUT to generate modulated three-dimensional electric field signals;
- separating DC components from AC components in said modulated three-dimensional electric field signals;
- and
- calculating a three-dimensional magnetic field of said DUT by using said DC and said AC components of said modulated three-dimensional electric field signals.
A method for measuring a three-dimensional magnetic-field of a DUT, comprising the steps of:
- providing an electric field probing system, which has a probe for detecting a three-dimensional electric field of said DUT;
- placing said probe above said DUT and fixing said probe at one position;
- modulating the position of said DUT around said position and detecting said electric field of said DUT to generate modulated three-dimensional electric field signals;
- separating DC components from AC components in said modulated three-dimensional electric field signals;
- and
- calculating a three-dimensional magnetic field of said DUT by using said DC components and said AC components of said modulated three-dimensional electric field signals.
A method for measuring a three-dimensional electric-field of a DUT, comprising the steps of:
- providing a magnetic field probing system, which has a probe for detecting a three-dimensional magnetic field of said DUT;
- placing said probe above said DUT at a position;
- modulating spatially the position of said probe and detecting said magnetic field of said DUT to generate modulated three-dimensional magnetic field signals;
- separating DC components from AC components in said modulated three-dimensional magnetic field signals;
- and
- calculating a three-dimensional electric field of said DUT by using said DC components and said AC components of said three-dimensional magnetic field signals.
A method for measuring a three-dimensional electric-field of a DUT, comprising the steps of:
- providing a magnetic field probing system, which has a probe for detecting a three-dimensional magnetic field of said DUT;
- placing said probe above said DUT and fixing said probe at a position;
- modulating spatially the position of said DUT around said position and detecting said magnetic field of said DUT to generate modulated three-dimensional magnetic field signals;
- separating DC components from AC components in said modulated three-dimensional magnetic field signals;
- and
- calculating a three-dimensional electric field of said DUT by using said DC components and said AC components of said modulated three-dimensional magnetic field signals.
Dependencies are inferred from the claim text.