Electron beam emitter
AssigneeAdvanced Electron Beams, Inc.
InventorsTzvi Avnery, Kenneth P. Felis
Life of this patent
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Abstract
An exit window for an electron beam emitter through which electrons pass in an electron beam includes an exit window foil having an interior and an exterior surface with a series of holes formed therethrough. A corrosion resistant layer having high thermal conductivity extends over the exterior surface and the holes of the exit window foil for resisting corrosion and increasing thermal conductivity. The layer extending over the holes of the exit window foil provide thinner window regions which allow easier passage of the electrons through the exit window.
Claims24
An exit window for an electron beam emitter through which electrons pass in an electron beam, the exit window comprising:
- an exit window foil having an interior and an exterior surface with a series of holes formed therein;
- and
- a corrosion resistant layer having high thermal conductivity extending over the exterior surface and the holes of the exit window foil for resisting corrosion and increasing thermal conductivity, said layer extending over the holes of the exit window foil providing thinner window regions which allow easier passage of the electrons through the exit window.
An exit window for an electron beam emitter through which electrons pass in an electron beam, the exit window comprising:
- an exit window foil having an interior and an exterior surface with a series of holes formed therein;
- and
- a corrosion resistant layer having high thermal conductivity extending over the exterior surface and the holes of the exit window foil for resisting corrosion and increasing thermal conductivity, said layer extending over the holes of the exit window foil providing thinner window regions which allow easier passage of the electrons through the exit window, the exit window foil comprising titanium and the corrosion resistant layer comprising diamond.
An electron beam emitter comprising:
- a vacuum chamber;
- an electron generator positioned within the vacuum chamber for generating electrons;
- and
- an exit window on the vacuum chamber through which the electrons exit the vacuum chamber in an electron beam, the exit window comprising an exit window foil having an interior and an exterior surface with a series of holes formed therein, and a corrosion resistant layer having high thermal conductivity extending over the exterior surface and the holes of the exit window foil for resisting corrosion and increasing thermal conductivity, said layer extending over the holes of the exit window foil providing thinner window regions which allow easier passage of the electrons through the exit window.
An exit window for an electron beam emitter through which electrons pass in an electron beam, the exit window comprising:
- an exit window foil having a series of holes formed therein;
- and
- a layer having high thermal conductivity extending over the exit window foil for increasing thermal conductivity, said layer extending over the holes of the exit window foil providing thinner window regions which allow easier passage of the electrons through the exit window.
A method of forming an exit window for an electron beam emitter through which electrons pass in an electron beam comprising:
- providing an exit window foil having an interior and an exterior surface;
- forming a corrosion resistant layer having high thermal conductivity over the exterior surface of the exit window foil for resisting corrosion and increasing thermal conductivity;
- and
- forming a series of holes through the exit window foil to provide thinner window regions where said layer extends over the holes of the exit window foil which allow easier passage of the electrons through the exit window.
A method of forming an exit window for an electron beam emitter through which electrons pass in an electron beam comprising:
- providing an exit window foil having an interior and an exterior surface;
- forming a corrosion resistant layer having high thermal conductivity over the exterior surface of the exit window foil for resisting corrosion and increasing thermal conductivity, the exit window foil comprising titanium and the corrosion resistant layer comprising diamond;
- and
- forming a series of holes through the exit window foil to provide thinner window regions where said layer extends over the holes of the exit window foil which allow easier passage of the electrons through the exit window.
A method of forming an electron beam emitter comprising:
- providing a vacuum chamber;
- positioning an electron generator within the vacuum chamber for generating electrons;
- and
- mounting an exit window on the vacuum chamber through which the electrons exit the vacuum chamber in an electron beam, the exit window comprising an exit window foil having an interior and an exterior surface with a series of holes therethrough, and a corrosion resistant layer having high thermal conductivity extending over the exterior surface and the holes of the exit window for resisting corrosion and increasing thermal conductivity, said layer extending over the holes of the exit window foil providing thinner window regions which allow easier passage of the electrons through the exit window.
A method of forming an exit window for an electron beam emitter through which electrons pass in an electron beam comprising:
- providing an exit window foil;
- forming a layer having high thermal conductivity over the exit window foil for increasing thermal conductivity;
- and
- forming a series of holes in the exit window foil to provide thinner window regions where said layer extends over the holes of the exit window foil which allow easier passage of the electrons through the exit window.
Dependencies are inferred from the claim text.