Bi-level microelectronic device package with an integral window
AssigneeSandia National Laboratories
InventorsKenneth A. Peterson, Robert D. Watson
Life of this patent
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AssigneeSandia National Laboratories
InventorsKenneth A. Peterson, Robert D. Watson
Estimating the term…
A package with an integral window for housing a microelectronic device. The integral window is bonded directly to the package without having a separate layer of adhesive material disposed in-between the window and the package. The device can be a semiconductor chip, CCD chip, CMOS chip, VCSEL chip, laser diode, MEMS device, or IMEMS device. The multilayered package can be formed of a LTCC or HTCC cofired ceramic material, with the integral window being simultaneously joined to the package during LTCC or HTCC processing. The microelectronic device can be flip-chip bonded so that the light-sensitive side is optically accessible through the window. The package has at least two levels of circuits for making electrical interconnections to a pair of microelectronic devices. The result is a compact, low-profile package having an integral window that is hermetically sealed to the package prior to mounting and interconnecting the microelectronic device(s).
A package with an integral window for housing a microelectronic device, comprising a monolithic multilayered body with an integral window;
A package with an integral window for housing a microelectronic device, comprising:
A package with an integral window for housing a microelectronic device, comprising:
A package with an integral window for housing a microelectronic device, comprising:
A package with an integral window for housing a microelectronic device, comprising:
Dependencies are inferred from the claim text.