Microelectromechanical system assembly and testing device
OwnerBrian E. Joseph, Elizabeth N. Krafticianinventors
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Abstract
A novel MEMS assembly and testing system that utilizes a scanning electron microscope (SEM) having 5 axes of freedom as the imaging instrument. Microgrippers or other tools mounted at the end of a linear motion feed through device having a motion resolution of about 10 nanometers are used as the manipulator. All of the assembly features are located inside of a vacuum chamber to permit operation of the SEM imaging system. A variety of other auxiliary devices that support the MEMS assembly and testing system are also included to enhance the capabilities thereof.
Claims9
A MEMS assembly and testing device comprising:
- A) a scanning electron microscope;
- B) a vacuum chamber having walls and within which said scanning electron microscope operates;
- C) a linear motion feedthrough device having a shaft that passes through a wall of said vacuum chamber and includes a linear motion feedthrough device shaft having a terminal end;
- D) attached to the terminal end and within said vacuum chamber a tool;
- E) a piezoelectric positioner located intermediate said linear motion feedthrough device shaft and said tool;
- F) in the vicinity of said tool in said vacuum chamber and controlled via stage controls external to said vacuum chamber a manipulable stage platform;
- G) a scanning electron microscope stage mounted on said stage platform;
- H) an assembly stage mounted on said scanning electron microscope stage;
- I) about the periphery of said assembly stage at least one mechanism for holding parts and other materials necessary for the accomplishment of assembly or testing;
- and
- J) an X-ray microanalysis system for the collection of Xrays and analysis and imaging thereof.
A MEMS assembly and testing device comprising:
- A) a scanning electron microscope;
- B) a vacuum chamber having walls and within which said scanning electron microscope operates;
- C) a linear motion feedthrough device having a shaft that passes through a wall of said vacuum chamber and includes a linear motion feedthrough device shaft having a terminal end;
- D) attached to the terminal end and within said vacuum chamber a tool;
- E) in the vicinity of said tool in said vacuum chamber and controlled via stage controls external to said vacuum chamber a manipulable stage platform;
- F) a scanning electron microscope stage mounted on said stage platform;
- G) an assembly stage mounted on said scanning electron microscope stage;
- H) an X-ray microanalysis system for the collection of X-rays and analysis and imaging thereof.
Dependencies are inferred from the claim text.