Enhanced scanning probe microscope
AssigneeNorthwestern University
InventorPeter V. Schwartz
Life of this patent
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Abstract
An enhanced scanning probe microscope is provided with means for controlling the atmosphere surrounding the probe tip and the sample or surface to be scanned. Additional enhancements include a tip holder which can be tuned to reflect the laser light of the apparatus on the photodiode, a brace to stabilize the optical microscope relative to the sample and a mirror placed to allow visualization of the sample and tip from the side. Also provided is an enhanced method of nanolithography using an enhanced scanning probe microscope in which it is possible to control the atmosphere surrounding the probe tip and the substrate to be patterned or etched.
Claims12
A device, comprising:
- a scanning probe microscope tip;
- a stage for holding a substrate;
- and
- an optical microscope objective;
- and
- an atmosphere control enclosure defining an enclosed space, wherein said atmosphere control enclosure surrounds said scanning probe microscope tip and said stage and wherein said atmosphere control enclosure comprises a top of flexible material having an airtight seal between said flexible top and said optical microscope objective.
A method of nanolithography comprising:
- providing a substrate;
- providing a scanning probe microscope tip;
- providing an atmosphere control enclosure defining an enclosed space, wherein said atmosphere control enclosure surrounds said scanning probe microscope tip and said substrate and wherein said atmosphere control enclosure comprises a flexible top having an airtight seal between said flexible silicon rubber top and an optical microscope objective;
- coating the tip with a patterning compound;
- and
- using the coated tip to apply the compound to the substrate so as to produce a desired pattern.
A scanning probe microscope, comprising
- an optical microscope;
- a stage for holding a substrate;
- and
- a stabilization brace, wherein said stabilization brace is interposed between said optical microscope and said stage for holding a substrate to prevent relative movement therebetween.
A scanning probe microscope, comprising:
- a) a scanning probe microscope tip;
- b) a stage for holding a substrate;
- c) an optical microscope having an objective;
- d) an atmosphere control enclosure defining an enclosed space, wherein said atmosphere control enclosure surrounds said scanning probe microscope tip and said stage and wherein said atmosphere control enclosure comprises at least one opening for communicating with an atmosphere control apparatus;
- e) an assembly for said scanning probe microscope tip, comprising:
- (i) a tip cartridge;
- (ii) a tip carrier, comprising said scanning probe microscope tip, wherein said tip carrier is secured to said tip cartridge;
- and
- (iii) a positioning mechanism for adjustably positioning said tip carrier in relation to said tip cartridge;
- f) a stabilization brace, wherein said stabilization brace is interposed between said optical microscope and said stage for holding a substrate to prevent relative movement therebetween;
- and
- g) a mirror positioned horizontally displaced from said scanning probe microscope tip and vertically aligned with said objective of said optical microscope to reflect a side image of said scanning probe microscope tip toward said objective.
Dependencies are inferred from the claim text.