Method of making semiconductor device having improved heat radiation plate arrangement
AssigneesHitachi, Ltd., Hitachi ULSI Systems Co., Ltd., Hitachi Hokkai Semiconductor, Ltd.
InventorsFujio Ito, Hiroaki Tanaka, Hiromichi Suzuki, Tokuji Toida, Takafumi Konno, Kunihiro Tsubosaki, Shigeki Tanaka, Kazunari Suzuki, Akihiko Kameoka
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