Method of manufacturing a EL display device
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorShunpei Yamazaki
Life of this patent
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Abstract
To decrease the number of layers while keeping or improving the performance of an EL element, so that the production cost is reduced. Cathodes (106, 107), a light emitting layer (108), an anode (109), and a passivation film (110) are formed on pixel electrodes (104, 105). Thereafter, the vicinity of the interface between the light emitting layer (108) and the anode (109) are doped with a halogen element through the passivation film (110) and the anode (109). This leads to formation of a hole conveying region (111) that functions as a hole conveying layer, thereby enhancing the light emission efficiency.
Claims24
A method of manufacturing an EL display device, comprising the steps of:
- forming a cathode;
- forming a light emitting layer on said cathode;
- forming an anode on said light emitting layer;
- forming a passivation film on said anode;
- and
- doping said light emitting layer with a halogen element through said passivation film.
A method of manufacturing an EL display device, comprising the steps of:
- forming a TFT over a substrate;
- forming a cathode that is electrically connected to said TFT;
- forming a light emitting layer on said cathode;
- forming an anode on said light emitting layer;
- forming a passivation film on said anode;
- and
- doping said light emitting layer with a halogen element through said passivation film.
A method of manufacturing an EL display device, comprising the steps of:
- forming a cathode;
- forming a light emitting layer on said cathode;
- forming an anode on said light emitting layer;
- forming a passivation film on said anode;
- selectively forming a resist on said passivation film;
- and
- doping said light emitting layer with a halogen element through said passivation film using said resist as a mask.
A method of manufacturing an EL display device, comprising the steps of:
- forming a cathode;
- forming a light emitting layer on said cathode;
- forming an anode on said light emitting layer;
- forming a passivation film on said anode;
- and
- doping said light emitting layer with an alkali metal element or an alkaline earth metal element through said passivation film.
A method of manufacturing an EL display device, comprising the steps of:
- forming a TFT over a substrate;
- forming a cathode that is electrically connected to said TFT;
- forming a light emitting layer on said cathode;
- forming an anode on said light emitting layer;
- forming a passivation film on said anode;
- and
- doping said light emitting layer with an alkali metal element or an alkaline earth metal element through said passivation film.
A method of manufacturing an EL display device, comprising the steps of:
- forming a cathode;
- forming a light emitting layer on said cathode;
- forming an anode on said light emitting layer;
- forming a passivation film on said anode;
- selectively forming a resist on said passivation film;
- and
- doping said light emitting layer with an alkali metal element or an alkaline earth metal element through said passivation film using said resist as a mask to dope.
Dependencies are inferred from the claim text.