Methods and systems for determining a presence of macro defects and overlay of a specimen

A system configured to determine at least two properties of a specimen during use, comprising:

• a stage configured to support the specimen during use;
• a measurement device coupled to the stage, comprising:
• an illumination system configured to direct energy toward a surface of the specimen during use;
• and
• a detection system coupled to the illumination system and configured to detect energy propagating from the surface of the specimen during use, wherein the measurement device is configured to generate one or more output signals responsive to the detected energy during use;
• and
• a processor coupled to the measurement device and configured to determine a first property, a second property, and a third property of the specimen from the one or more output signals during use, wherein the first property comprises a presence of macro defects on the specimen, wherein the second property comprises overlay misregistration of the specimen, and wherein the third property is selected from the group consisting of a roughness of the specimen, a roughness of a layer on the specimen, and a roughness of a feature of the specimen.

A system configured to determine at least two properties of a specimen during use, comprising:

• a stage configured to support the specimen during use;
• a measurement device coupled to the stage, comprising:
• an illumination system configured to direct energy toward a surface of the specimen during use, wherein the illumination system is further configured to direct energy toward a bottom surface of the specimen during use;
• and
• a detection system coupled to the illumination system and configured to detect energy from the surface of the specimen during use, wherein the detection system is configured to detect energy propagating from the bottom surface of the specimen during use, and wherein the measurement device is configured to generate one or more output signals responsive to the detected energy during use;
• and
• a processor coupled to the measurement device and configured to determine a first property and a second property of the specimen from the one or more output signals during use, wherein the first property comprises a presence of macro defects on the bottom surface of the specimen, and wherein the second property comprises overlay misregistration of the specimen.

A system configured to determine at least two properties of a specimen during use, comprising:

• a stage configured to support the specimen during use;
• a measurement device coupled to the stage, comprising:
• an illumination system configured to direct energy toward a surface of the specimen during use;
• and
• a detection system coupled to the illumination system and configured to detect energy propagating from the surface of the specimen during use, wherein the measurement device is configured to generate one or more output signals responsive to the detected energy during use;
• and
• a processor coupled to the measurement device and configured to determine a first property and a second property of the specimen from the one or more output signals during use, wherein the first property comprises a presence of macro defects on the specimen, wherein the second property comprises overlay misregistration of the specimen, and wherein the system is coupled to a lithography tool.

A system configured to determine at least two properties of a specimen during use, comprising:

• a stage configured to support the specimen during use, wherein a process tool comprises a first process chamber and a second process chamber, and wherein the stage is further configured to move the specimen from the first process chamber to the second process chamber;
• a measurement device coupled to the stage, comprising:
• an illumination system configured to direct energy toward a surface of the specimen during use;
• and
• a detection system coupled to the illumination system and configured to detect energy propagating from the surface of the specimen during use, wherein the measurement device is configured to generate one or more output signals responsive to the detected energy during use;
• and
• a processor coupled to the measurement device and configured to determine a first property and a second property of the specimen from the one or more output signals during use, wherein the first property comprises a presence of macro defects on the specimen, and wherein the second property comprises overlay misregistration of the specimen.

A system configured to determine at least two properties of a specimen during use, comprising:

• a stage configured to support the specimen during use;
• a measurement device coupled to the stage, comprising:
• an illumination system configured to direct energy toward a surface of the specimen during use;
• and
• a detection system coupled to the illumination system and configured to detect energy propagating from the surface of the specimen during use, wherein the measurement device is configured to generate one or more output signals responsive to the detected energy during use;
• and
• a processor coupled to the measurement device and configured to determine a first property and a second property of the specimen from the one or more output signals during use, wherein the first property comprises a presence of macro defects on the specimen, wherein the second property comprises overlay misregistration of the specimen, wherein the processor is further coupled to a process tool, and wherein the processor is further configured to alter a parameter of one or more instruments coupled to the process tool in response to at least one of the determined properties.

A system configured to determine at least two properties of a specimen during use, comprising:

• a stage configured to support the specimen during use;
• a measurement device coupled to the stage, comprising:
• an illumination system configured to direct energy toward a surface of the specimen during use;
• and
• a detection system coupled to the illumination system and configured to detect energy propagating from the surface of the specimen during use, wherein the measurement device is configured to generate one or more output signals responsive to the detected energy during use;
• and
• a processor coupled to the measurement device and configured to determine a first property and a second property of the specimen from the one or more output signals during use, wherein the first property comprises a presence of macro defects on the specimen, wherein the second property comprises overlay misregistration of the specimen, wherein the processor is further coupled to a process tool, and wherein the processor is further configured to monitor a parameter of one or more instruments coupled to the process tool during use.