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AssigneeSTMicroelectronics S.r.l.
InventorsUbaldo Mastromatteo, Flavio Villa, Gabriele Barlocchi
Estimating the term…
The integrated device for microfluid thermoregulation comprises a semiconductor material body having a surface; a plurality of buried channels extending in the semiconductor material body at a distance from the surface of the semiconductor material body; inlet and outlet ports extending from the surface of the semiconductor material body as far as the ends of the buried channels and being in fluid connection with the buried channels; and heating elements on the semiconductor material body. Temperature sensors are arranged between the heating elements above the surface of the semiconductor material body.
An integrated device for microfluid thermoregulation, comprising:
A process for manufacturing an integrated device for microfluid thermoregulation, comprising:
A device for microfluid thermoregulation comprising:
A method for manufacturing a device for microfluid thermoregulation, comprising:
An integrated device for microfluid thermoregulation, comprising:
A process for manufacturing an integrated device for microfluid thermoregulation, comprising:
A process for manufacturing an integrated device for microfluid thermoregulation, comprising:
Dependencies are inferred from the claim text.
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Packages comprising articles attached to cards, sheets or webs
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Artificial flowers, fruit, leaves, or trees ; Garlands: artificial grass
Artificial flowers, fruit, leaves, or trees ; Garlands: implements, apparatus, or machines for making artificial flowers, or the like
Term ended 5 Jan 2022 (estimated)
The present invention refers to an integrated device for microfluid thermoregulation and a manufacturing process thereof.
As is known, the treatment of some fluids involves an increasingly precise temperature regulation, in particular when chemical or biochemical reactions are involved. Furthermore frequently the need is felt of using very small amounts of fluid since the fluid is costly or not readily available.
For example, in the DNA amplification process (Polymerase Chain Reaction process, or PCR process) in which precise temperature control in the various steps (it is necessary to perform repeated preset thermal cycles), there is a need to avoid as far as possible thermal gradients in the fluid reaction areas (so that in these areas there may be a uniform temperature), and also the quantity of fluid used (which is very costly) is of crucial importance for obtaining a good reaction efficiency or even for obtaining the reaction itself.
For a better understanding of the present invention, preferred embodiments thereof are now described, as non-limiting examples, with reference to the attached drawings, wherein:
FIG. 1 is a perspective view of a base incorporating a first embodiment of the integrated device for thermoregulation according to the invention;
FIG. 2 shows a perspective cross-section of the integrated device of FIG. 1, taken along section line II—II of FIG. 1;
FIGS. 1-3 show an integrated device 1 comprising a body 2 of semiconductor material, typically monocrystalline silicon, having a surface 3 and parallelepiped shape The body 2 is traversed by a plurality of channels 4 (visible in the sections of FIGS. 2 and 3) connected to the surface 3 of the body 2 through an inlet port 5a and an outlet port 5b, which are connected to the channels 4 at ends 4a and 4b of the channels 4. Heating elements 10 are present on the surface 3 of the body 2.
In detail, the channels 4 extend parallel to each other, in the lengthwise direction of the body 2, at a preset distance from the surface 3. For example, for the use of the device as a reactor in the DNA amplification process, the channels 4 may have a roughly circular or rectangular section, may be spaced 50 μm, and may be set at a depth of 5-10 μm from the surface 3. In the case of rectangular section, the channels 4 have a side of approximately 30×200 μm and occupy an area of 5×10 mm.
In FIGS. 1-3, the channels 4 are all connected to a same inlet port 5a and to a same outlet port 5b, and are thus in parallel. The inlet port 5a and outlet port 5b have an elongated shape and extend perpendicularly to the channels 4 and to the surface 3, at the two opposite ends of the channels 4.