Hydrogen gettering system
AssigneeTexas Instruments Incorporated
InventorsJohn M. Bedinger, Clyde R. Fuller
Life of this patent
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Abstract
A method, system and materials for use in hydrogen gettering in conjunction with microelectronic and microwave components that are generally hermetically sealed in an enclosure typically referred to as a “package”. Gettering materials that can be used include titanium with or without a hydrogen permeable coating or covering, alloys of zirconium-vanadium iron and zeolites and several ways to apply these materials to the package. In addition, the hydrogen permeable material can be used over a vent from the interior of the package to the exterior wherein hydrogen will escape from the package interior when the hydrogen concentration within the package is greater than without the package.
Claims6
A semiconductor device which comprises:
- (a) a semiconductor material which is degradable in the presence of hydrogen;
- and
- (b) an elemental titanium-containing package having an hermetically sealed interior region and a substantially oxide-free interior surface, said interior region housing said material and electronics therein, said titanium in said titanium-containing package separated from said electronics, said titanium-containing package containing a layer of hydrogen permeable palladium on said oxide-free surface between said interior surface of said package and said material to isolate said elemental titanium from said package interior.
Dependencies are inferred from the claim text.