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US 6,673,252 B2Granted
Method of fabricating a refractive silicon microlens
AssigneeKorea Advanced Institute of Science and Technology
InventorsChoon Sup Lee, Chul Hi Han
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AssigneeKorea Advanced Institute of Science and Technology
InventorsChoon Sup Lee, Chul Hi Han
Estimating the term…
A method of fabricating a refractive silicon microlens by using micro-machining technology. The method of fabricating a refractive silicon microlens according to the present invention comprises the steps of forming a boron-doped region on a silicon substrate, and selectively removing regions of the substrate except for the boron-doped region to form a lens comprised of only the boron-doped region. With the method of the present invention, it is possible to fabricate a two-dimensional infrared silicon microlens array. By using such a two-dimensional infrared silicon microlens array in an infrared sensor, the detectivity of the infrared sensor can be increased by 3.4 times, which is the refraction index of silicon. In addition, the two-dimensional infrared silicon microlens array of the present invention can be used with commercial infrared telecommunication devices.
A method of fabricating a refractive silicon microlens, the method comprising the steps of:
Dependencies are inferred from the claim text.