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US 6,673,148 B2Granted
Method of using a magnetic field furnace to manufacture semiconductor substrates
AssigneeEbara Solar, Inc.
InventorsHilton F. Glavish, Hideyuki Isozaki, Keiji Maishigi, Kentaro Fujita
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Abstract
An apparatus and method is provided for manufacturing a semiconductor substrate such as web crystals. The apparatus includes a chamber and a growth hardware assembly housed within the chamber. A magnetic field system produces a vertical magnetic field within the chamber.
Claims20
A method for manufacturing a semiconductor substrate, comprising:
- (a) producing a melt by melting substrate material within a growth hardware assembly located inside a chamber;
- (b) creating a magnetic field substantially within the chamber by using a magnetic field generator that encircles the perimeter of the chamber;
- and
- (c) growing the semiconductor substrate from the melt.
1 more element
A method for manufacturing a semiconductor substrate, wherein the substrate grown is dendritic web silicon or dendritic web germanium, comprising:
- (a) producing a melt by melting substrate material within a growth hardware assembly located inside a chamber;
- (b) creating a magnetic field substantially within the chamber by using a magnetic field generator that encircles the perimeter of the chamber, wherein creating a magnetic field substantially within the chamber includes:
- (b)(i) encircling the chamber with a coil assembly capable of conducting electrical current;
- and
- (b)(ii) producing a magnetic field in a vertical direction;
- (c) cooling the coil assembly by establishing thermal communication between a cooling plate and the coil assembly, wherein cooling the coil assembly includes:
- (c)(i) running water through tubes disposed in the cooling plate for transferring heat generated from electrical current passing through the coil assembly;
- and
- (c)(ii) electrically isolating the cooling tubes from the coil assembly to substantially eliminate electrolysis;
- and
- (d) growing the semiconductor substrate from the melt.
8 more elements
Dependencies are inferred from the claim text.