Multiple chamber fabrication equipment for thin film transistors in a display or electronic device
AssigneeSeiko Epson Corporation
InventorMitsutoshi Miyasaka
Life of this patent
Estimating the term…
Abstract
TFT fabrication equipment including a first chamber for processing under oxidizing atmosphere, a second chamber for processing under reducing atmosphere, a third chamber for performing crystallization, a fourth chamber for load-locking, and a fifth chamber. A substrate is transferred from any one chamber of the first, second, third and fourth chamber to another chamber of the first, second, third and fourth chamber. The fifth chamber is connected to the first chamber via a first shutter, being connected to the second chamber via a second shutter, being connected to the third chamber via a third shutter, and being connected to the fourth chamber via a fourth shutter.
Claims7
A TFT fabrication equipment comprising:
- a first chamber having a first zone for forming a semiconductor layer and a second zone for crystallizing the semiconductor layer;
- a transport system arranged in the first chamber, and conveying a substrate, on which the semiconductor layer is formed, from the first zone to the second zone;
- and
- a second chamber having a third zone for forming an insulation layer.
A TFT fabrication equipment comprising:
- a first chamber for forming a semiconductor layer;
- a second chamber for crystallizing the semiconductor layer;
- a third chamber for forming a gate insulator;
- a fourth chamber for load-locking;
- and
- a fifth chamber, via which a substrate is transferred from any one chamber of the first chamber, the second chamber, the third chamber, and the fourth chamber to another chamber of the first chamber, the second chamber, third chamber, and the fourth chamber, the fifth chamber including a pressurization device that emits an inert gas,
- the fifth chamber being connected to the first chamber via a first shutter, being connected to the second chamber via a second shutter, being connected to the third chamber via a third shutter, and being connected to the fourth chamber via a fourth shutter.
Dependencies are inferred from the claim text.