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US 6,672,925 B2Granted
Vacuum microelectronic device and method
AssigneeMotorola, Inc.
InventorsAlbert Alec Talin, James E. Jaskie, Bernard F. Coll
Life of this patent
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Abstract
A vacuum microelectronic device (10,40) emits electrons (37) from surfaces of nanotube emitters (17, 18). Extracting electrons from the surface of each nanotube emitter (17) results is a small voltage variation between each emitter utilized in the device (10, 40). Consequently, the vacuum microelectronic device (10,40) has a more controllable turn-on voltage and a consistent current density from each nanotube emitter (17,18).
Claims12
A method of forming a vacuum microelectronic device comprising:
- forming at least one nanotube emitter having ends and further including electrically contacting the at least one nanotube emitter proximal to the ends;
- and
- extracting electrons from surfaces of the at least one nanotube by applying a first voltage to one end of the at least one nanotube emitter and a second voltage to another end of the at least one nanotube emitter.
A method of forming a vacuum microelectronic device comprising:
- providing a substrate having a plurality of attachment sites;
- forming at least one nanotube emitter overlying each attachment site, the at least one nanotube emitter having ends;
- and
- electrically contacting the at least one nanotube emitter proximal to the ends;
- and
- extracting electrons from surfaces of the at least one nanotube by applying first voltage to one end of the at least one nanotube emitter and a second voltage to another end of the at least one nanotube emitter.
3 more elements
Dependencies are inferred from the claim text.