Vacuum pump
AssigneeVarian, Inc.
InventorRoberto Cerruti
Life of this patent
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Abstract
A turbomolecular vacuum pump (5) comprises a first pumping section (1) having pumping stages with bladed rotor discs, a second pumping section (2) having pumping stages with smooth rotor discs, a third pumping section (3) having a pumping stage with a toothed rotor disc (26), and a fourth pumping section (4) of the ejector or venturi pump type. (FIG. 1a)
Claims10
A vacuum pump (5) comprising a plurality of pumping sections arranged between a suction duct (6) and an exhaust duct (16) and including at least one turbomolecular pumping section (1, 2, 3), characterised in that said pump comprises a pumping section (4) of the ejector or venturi pump type.
The vacuum pump (5) as claimed in any of the preceding claims, wherein said pumping sections (1, 2, 3, 4) form a single body.
Dependencies are inferred from the claim text.