Vacuum pump
AssigneeSeiko Instruments Inc.
InventorsYoshihiro Yamashita, Manabu Nonaka, Takashi Kabasawa
Life of this patent
Estimating the term…
Abstract
To provide a small vacuum pump making it possible to efficiently perform evacuation from the atmosphere to a high vacuum (degree of vacuum: 10−5 Pa) by using a single pump unit. A turbo-molecular pump mechanism portion is arranged on the high-vacuum side, a volute pump mechanism portion is arranged on the atmosphere side, and a thread groove pump mechanism portion is arranged between the turbo-molecular pump mechanism portion and the volute pump mechanism portion. Further, rotor blades of the turbo-molecular pump mechanism portion, a rotor of the thread groove pump mechanism portion, and an impeller of the volute pump mechanism portion are integrally mounted to a single rotor shaft, which is rotated by a single motor.
Claims11
A vacuum pump comprising:
- a turbo-molecular pump mechanism portion for performing an evacuating operation through interaction between rotating rotor blades and stationary stator blades;
- a thread groove pump mechanism portion for performing an evacuating operation through interaction between a rotating rotor and a thread groove;
- and
- a volute pump mechanism portion for performing an evacuating operation through rotation of a volute impeller;
- wherein the turbo-molecular pump mechanism portion is arranged on a high vacuum side, the volute pump mechanism portion is arranged on an atmosphere side, and the thread groove pump mechanism portion is arranged between the turbo-molecular pump mechanism portion and the volute pump mechanism portion.
A vacuum pump comprising:
- a turbo-molecular pump mechanism portion having rotatable rotor blades coacting with stationary stator blades for pumping gas from an enclosed space;
- a thread groove pump mechanism portion connected to receive the gas pumped by the turbo-molecular pump mechanism portion and having a rotatable rotor coacting with a thread groove for pumping the received gas;
- and a volute pump mechanism portion connected to receive the gas pumped by the thread groove pump mechanism portion and having a rotatable volute impeller for pumping and discharging the received gas.
Dependencies are inferred from the claim text.