Semiconductor processing apparatus having linear conveyer system

A transport system for manipulating a wafer within a processing section of a processing apparatus used in microelectronic fabrication, the transport system comprising:

• first and second wafer transfer units;
• a transport unit guide for supporting the first and second wafer transfer units as each unit moves independently between a respective first position and a respective second position, the transport unit guide comprising a frame, first and second lateral guide rails spaced apart horizontally and mounted on opposite sides of the frame, a third lateral guide rail mounted on the frame and disposed parallel with and vertically below the first lateral guide rail, and a series of magnetic segments arranged upon the transport unit guide proximate the first and second lateral guide rails;
• each of the first and second wafer transfer units comprising a tram translatably attached to the respective lateral guide rail, a wafer transfer arm assembly attached to the respective tram for manipulating the wafer, an electromagnet mounted on the tram in cooperative relation with a respective set of the magnetic segments for moving the transfer unit along the respective guide rail in response to control signals, actuators responsive to control signals for controlling the movement of the transfer arm assembly, sensors for monitoring the position of the transfer unit along the respective guide rail and the positional state of the transfer arm assembly, wherein the tram of the first transport unit is translatably attached to the third lateral guide rail;
• a controller disposed remote of the first and second transfer units, the controller being responsive to signals received from the sensors and providing the control signals for directing the movement of the first and second transfer units and the respective transfer arm assemblies;
• and
• a communication link between the first and second wafer transfer units and the controller for facilitating control of the operation of the wafer transfer units.

A transport system for manipulating a wafer within a processing section of a processing apparatus used in microelectric fabrication, the transport system comprising:

• first and second wafer transfer units;
• a transport unit guide for supporting the first and second wafer transfer units as each unit moves independently between a respective first position and a respective second position, the transport unit guide including first and second guide members spaced apart laterally along an axis and a series of magnetic segments arranged proximate to the first and second guide members;
• each of the first and second wafer transfer units comprising a tram translatably coupled to the respective lateral guide member, a wafer transfer arm assembly depending from the respective tram and configured to manipulate the wafer and access processing stations positioned on opposite sides of the axis, an electromagnet mounted on the tram in cooperative relation with a respective set of the magnetic segments positioned to move the transfer unit along the respective guide member in response to control signals, actuators responsive to control signals to control the movement of the transfer arm assembly, sensors to monitor the position of the transfer unit along the respective guide member and the positional state of the transfer arm assembly;
• a controller disposed remote of the first and second transfer units, the controller being responsive to signals received from the sensors and providing the control signals for directing the movement of the first and second transfer units and the respective transfer arm assemblies;
• and
• a communication link between the first and second wafer transfer units and the controller for facilitating control of the operation of the wafer transfer units.