Micromechanical oscillating device
AssigneeRobert Bosch GmbH
InventorsAndreas Niendorf, Wilhelm Frey, Karsten Funk
Life of this patent
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Abstract
A vibrating microdevice, such as a vibrating micromirror, includes a vibrating structure which is connected to a supporting body via at least one spring structure in an at least a largely floating manner, the spring structure including at least one torsion-spring element defining a torsion axis and permitting a torsional vibration about the torsion axis to be induced in the vibrating structure, the spring structure also including at least one converter structure, which at least partially converts forces acting at least largely perpendicularly to the torsion axis on the torsion spring element into forces acting at least partially parallelly to the torsion axis on the torsion-spring element.
Claims18
A vibrating microdevice, comprising:
- a supporting body;
- at least one spring structure having at least one torsion-spring element and at least one converter structure, the torsion-spring element defining a torsion axis;
- and
- a vibrating structure connected to at least the supporting body by the spring structure in a largely floating manner, a torsional vibration of the vibrating structure inducible about the torsion axis;
- wherein the converter structure at least partially converts external forces acting at least substantially perpendicularly to the torsion axis into forces acting on the torsion-spring element in a direction parallel to the torsion axis.
Dependencies are inferred from the claim text.