Ink-jet recording head and method of producing the same
AssigneeFujitsu Limited
InventorsShuji Koike, Yoshiaki Sakamoto, Tomohisa Shingai, Seigen Otani, Toshihiko Osada
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AssigneeFujitsu Limited
InventorsShuji Koike, Yoshiaki Sakamoto, Tomohisa Shingai, Seigen Otani, Toshihiko Osada
Estimating the term…
A highly accurate, downsized ink-jet recording head producible at low cost by using a thin-film deposition technology is provided. The ink-jet recording head, in which a piezoelectric layer is formed subsequent to an electrode layer on a substrate by using a thin-film deposition technology and an energy-generating element for generating energy for ink ejection is formed by etching the electrode and the piezoelectric layers simultaneously by an ion milling process, includes a fine powder reception part on which mixed fine powders including at least those etched off the electrode layer and the piezoelectric layer by the ion milling process are deposited, the fine powder reception part being provided in a periphery of the energy-generating element.
An ink-jet recording head in which a piezoelectric layer is formed subsequent to an electrode layer on a substrate by using a thin-film deposition technology and an energy-generating element for generating energy for ink ejection is formed by etching the electrode and the piezoelectric layers simultaneously by an ion milling process, the ink-jet recording head comprising:
A printer comprising:
Dependencies are inferred from the claim text.