Sample processing system
AssigneeCanon Kabushiki Kaisha
InventorsKazutaka Yanagita, Kazuaki Ohmi, Kiyofumi Sakaguchi
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Abstract
This invention is to provide a processing system suitable for manufacturing an SOI substrate. A processing system includes a scalar robot for conveying a bonded substrate stack held by a robot hand, and a centering apparatus, separating apparatus, inverting apparatus, and cleaning/drying apparatus disposed at substantially equidistant positions from a driving shaft of the scalar robot. When the robot hand is pivoted about the driving shaft in the horizontal plane and moved close to or away from the driving shaft, a bonded substrate stack or separated substrate is conveyed among the processing apparatuses.
Claims40
A processing system for processing a plate shaped sample, comprising:
- a conveyor mechanism having a holding portion for substantially horizontally holding a plate shaped sample, said conveyor mechanism conveying the sample held by said holding portion;
- and
- a plurality of processing apparatuses disposed at equidistant positions separated from a driving shaft of said conveyor mechanism,
- wherein said conveyor mechanism pivots said holding portion about the driving shaft substantially in a horizontal plane and moves said holding portion close to or away from the driving shaft to convey the plate shaped sample among said plurality of processing apparatuses while receiving/transferring the plate shaped sample from/to each of said plurality of processing apparatuses in substantially horizontal state, and
- said plurality of processing apparatuses include:
- a separating apparatus for separating the plate shaped sample while substantially horizontally holding the plate shaped sample;
- and
- an inverting apparatus for pivoting an upper plate shaped sample of two plate shaped samples obtained by separation by said separating apparatus through 180°.
A processing system for processing a plate shaped sample, comprising:
- a plurality of processing apparatuses for handling or processing the plate shaped sample;
- and
- a conveyor mechanism having a holding portion for substantially horizontally holding the plate shaped sample, said conveyor mechanism linearly moving said holding portion in a horizontal plane, pivoting said holding portion about a pivot shaft, and moving said holding portion close to or away from the pivot shaft to convey the plate shaped sample among said plurality of processing apparatuses while transferring/receiving the plate shaped sample to/from each of said plurality of processing apparatuses in a substantially horizontal state,
- wherein said plurality of processing apparatuses are disposed at positions where said conveyor mechanism can transfer the plate shaped sample and said plurality of processing apparatuses include:
- a separating apparatus for separating the plate shaped sample while substantially horizontally holding the plate shaped sample, and
- an inverting apparatus for pivoting an upper plate shaped sample of two plate shaped samples obtained by separation by said separating apparatus through 180°.
A processing system for processing a plate shaped sample, comprising:
- a plurality of processing apparatuses for handling or processing the plate shaped sample;
- and
- a conveyor mechanism having a holding portion for substantially horizontally holding the plate shaped sample, said conveyor mechanism moving said holding portion to convey the plate shaped sample among said plurality of processing apparatuses while transferring/receiving the plate shaped sample to/from each of said plurality of processing apparatuses in a substantially horizontal state,
- wherein said plurality of processing apparatuses are disposed at positions where said conveyor mechanism can transfer the plate shaped sample and said plurality of processing apparatuses include:
- a separating apparatus for separating the plate shaped sample while substantially horizontally holding the plate shaped sample, and
- an inverting apparatus for pivoting an upper plate shaped sample of two plate shaped samples obtained by separation by said separating apparatus through 180°.
Dependencies are inferred from the claim text.