Semiconductor dynamic quantity sensor
AssigneeDenso Corporation
InventorsMinekazu Sakai, Yoshiyuki Kato
Life of this patent
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Abstract
In a dynamic quantity sensor for detecting a dynamic quantity, a movable portion having comb-shaped movable electrodes is connected to a base portion through a beam portion as a spring portion, and moves in direction Y upon receiving dynamic quantity. Comb-shaped fixed electrodes are arranged opposite to the movable electrodes through detection intervals. A Q value of vibration of the movable portion in the direction Y is smaller than {fraction (1/500)} of a resonance frequency of the movable portion in the direction Y. Therefore, free vibration of the movable portion is rapidly damped so as not to adversely affect sensor output.
Claims8
A dynamic quantity sensor comprising:
- a base portion;
- a spring portion for moving in a predetermined direction in accordance with a dynamic quantity applied thereto, the spring portion being connected to the base portion;
- a movable portion connected to the spring portion for moving together with the spring portion in the predetermined direction;
- a movable electrode integrated with the movable portion for moving together with the movable portion;
- and
- a fixed electrode supported by the base portion and arranged opposite to the movable electrode while defining a detection interval, a change of which caused by displacement of the movable electrode is detected to detect the dynamic quantity, wherein:
- a Q value of vibration of the movable portion in the predetermined direction is smaller than {fraction (1/500)} of a resonance frequency of the vibration of the movable portion in the predetermined direction.
A dynamic quantity sensor comprising:
- a base portion;
- a spring portion for moving in a predetermined direction in accordance with a dynamic quantity applied thereto, the spring portion being provided above the base portion;
- a movable portion connected to the spring portion for moving together with the spring portion in the predetermined direction;
- a movable electrode integrated with the movable portion for moving together with the movable portion;
- and
- a fixed electrode supported by the base portion and arranged opposite to the movable electrode while defining a detection interval, a change of which caused by displacement of the movable electrode is detected to detect the dynamic quantity, wherein:
- a Q value of vibration of the movable portion in the predetermined direction is smaller than {fraction (1/500)} of a resonance frequency of the vibration of the movable portion in the predetermined direction.
Dependencies are inferred from the claim text.